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Nanoscale wireframe SQUID on a cantilever by corner lithography

Thijs J. Roskamp1, Tim Horstink2, Melissa J. Goodwin1, Erwin Berenschot1, Edin Sarajilic2, Roeland Huijink2, Niels Tas1, and Hans Hilgenkamp1,*

  • *Contact author: j.w.m.hilgenkamp@utwente.nl
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Phys. Rev. Applied 26, 034054 – Published 23 September, 2026

DOI: https://doi.org/10.1103/3qfq-4458

Abstract

We present the fabrication of nanoscale superconducting quantum interference devices (SQUIDs) at the apex of wireframe tips on self-aligned superconducting cantilever probes. The probes are made on silicon wafers using molding techniques in combination with corner lithography, which results in a nanowire frame tip with a tunable apex structure. A shadow-effect deposition using magnetron sputtering of niobium creates self-aligned superconducting wireframes on cantilevers with accompanying device circuitry. Superconducting weak links are realized at the apex of the wireframes with the use of focused ion beam nanopatterning. The realized SQUIDs have effective diameters ranging from several micrometers down to 100 nm and can be operated in magnetic fields up to 1 T. Furthermore, the nanowires in the wireframe can be used to flux modulate the SQUID locally. This fabrication process enables the production of wafer-scale templates for probes based on on-tip superconducting devices.

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Phys. Rev. Applied 26, 034054– Published 23 September, 2026
  • Received 3 February 2026
  • Revised 29 May 2026
  • Accepted 28 August 2026
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