Transducer width dependent stiffening of gigahertz surface acoustic waves in silicon
Phys. Rev. B 114, 235401 – Published 1 October, 2026
DOI: https://doi.org/10.1103/yx2j-gfpg
Abstract
Precise control of the surface acoustic wave (SAW) frequency is essential for the reliable operation of high-frequency acoustic devices, which is typically achieved by varying the transducer periodicity . However, the effect of transducer width , or equivalently, the ratio, on frequency remains largely unexplored. Here, we investigate the generation and detection of GHz SAWs using metallic transducers of varying width but having constant periodicity fabricated on a nonpiezoelectric silicon wafer. Coherent SAWs are optically excited using near-infrared femtosecond pulses and probed via time-resolved extreme ultraviolet diffraction, enabling simultaneous measurement of first- and second-order SAWs. We find that as decreases from 410 to 45 nm for constant , the first- and second-order SAW frequencies stiffen by nearly 3% and 6.5%, respectively. The measured stiffening exceeds predictions from finite-element-based linear-elastic eigenvalue analysis by 1% and 1.5%, respectively, thus making the SAW frequency transducer width dependent. The analysis of displacements, strains, and strain gradients indicates that the additional stiffening on decreasing may arise from large strain gradients at the transducer edges. Importantly, this relatively small change in SAW frequency for a large variation in establishes transducer width as a sensitive parameter for fine and continuous tuning of SAW frequency by approximately 1%–6% in the vicinity of the desired frequency, enabling precise control beyond what is typically achievable with alone. Such fine-tuning capability is particularly relevant for applications in radio-frequency signal processing and quantum acoustic systems, where even small deviations can significantly impact device performance.