-hyperdoped produced by ion implantation and pulsed laser melting exhibits sub-band-gap absorption in the near infrared, a property that is interesting for photonics. However, the sub-band-gap absorption has previously been shown to be thermally metastable. In this work, we study the atomistic processes that occur during the thermal relaxation of -hyperdoped . We show that the first step in thermal relaxation is the release of substitutional from lattice sites. This process is characterized by an activation energy of around 1.6 eV, a value similar to that associated with diffusion in , suggesting that both processes could be rate limited by the exchange of substitutional and interstitial atoms. As the system further relaxes, is found to locally diffuse and become trapped at nearby lattice defects, notably vacancies and vacancy complexes. In fact, density-functional theory results suggest that the formation of dimers is energetically favourable after the becomes locally trapped. The dimers could subsequently evolve into trimers, etc., as other diffusing atoms become trapped at the dimer. At low concentrations, this clustering process does not form visible precipitation after annealing at for 3 min. In contrast, spherical precipitates are found in samples with higher concentrations (), where the atoms and the associated lattice defect distributions are laterally inhomogeneous.