- Open Access
Multiphoton enhanced resolution for superconducting nanowire single-photon detector-based time-of-flight lidar systems
Phys. Rev. Research 7, 033114 – Published 1 August, 2025
DOI: https://doi.org/10.1103/sv4y-qps6
Abstract
Superconducting nanowire single photon detectors (SNSPDs) emerged in the last decade as a disruptive technology that features performance characteristics, such as high sensitivity, dynamic range, and temporal accuracy, which are ideally suited for light detection and ranging (lidar) applications. Here, we report a time-of-flight lidar system based on waveguide-integrated SNSPDs that excels in temporal accuracy, which translates into high range resolution. For single-shot measurements, we find resolution in the millimeter regime, resulting from the jitter of the time-of-flight signal of for low photon numbers. We further decrease this signal jitter to by driving the SNSPD into a multiphoton detection regime, utilizing laser pulses of higher intensity, thus improving range resolution. For multishot measurements, we find submillimeter range accuracy of and reveal additional surface information of scanned objects by visualizing the number of reflected photons and their temporal spread with the acquired range data in a combined representation. Our realization of a lidar receiver exploits favorable timing accuracy of waveguide-integrated SNSPDs and extends their operation to the multiphoton regime, which benefits a wide range of remote sensing applications.
Physics Subject Headings (PhySH)
Article Text
References (58)
- S. Royo and M. Ballesta-Garcia, An overview of lidar imaging systems for autonomous vehicles, Appl. Sci. 9, 4093 (2019).
- R. Roriz, J. Cabral, and T. Gomes, Automotive lidar technology: A survey, IEEE Trans. Intelligent Transp. Sys. 23, 6282 (2022).
- V. Wulfmeyer, R. M. Hardesty, D. D. Turner, A. Behrendt, M. P. Cadeddu, P. Di Girolamo, P. Schlüssel, J. Van Baelen, and F. Zus, A review of the remote sensing of lower tropospheric thermodynamic profiles and its indispensable role for the understanding and the simulation of water and energy cycles, Rev. Geophys. 53, 819 (2015).
- R. Heinze, A. Dipankar, C. C. Henken, C. Moseley, O. Sourdeval, S. Trömel, X. Xie, P. Adamidis, F. Ament, H. Baars, C. Barthlott, A. Behrendt, U. Blahak, S. Bley, S. Brdar, M. Brueck, S. Crewell, H. Deneke, P. D. Girolamo, R. Evaristo, J. Fischer, C. Frank et al., Large-eddy simulations over Germany using icon: A comprehensive evaluation, Q. J. R. Meteorol. Soc. 143, 69 (2017).
- G. Ehret, P. Bousquet, C. Pierangelo, M. Alpers, B. Millet, J. B. Abshire, H. Bovensmann, J. P. Burrows, F. Chevallier, P. Ciais, C. Crevoisier, A. Fix, P. Flamant, C. Frankenberg, F. Gibert, B. Heim, M. Heimann, S. Houweling, H. W. Hubberten, P. Jöckel et al., MERLIN: A French-German space lidar mission dedicated to atmospheric methane, Remote Sens. 9, 1052 (2017).
- A. Comerón, C. Muñoz-Porcar, F. Rocadenbosch, A. Rodríguez-Gómez, and M. Sicard, Current research in lidar technology used for the remote sensing of atmospheric aerosols, Sensors 17, 1450 (2017).
- K. Lim, P. Treitz, M. Wulder, B. St-Onge, and M. Flood, Lidar remote sensing of forest structure, Prog. Phys. Geogr.: Earth Environ. 27, 88 (2003).
- A. T. Hudak, J. S. Evans, and A. M. Stuart Smith, Lidar utility for natural resource managers, Remote Sens. 1, 934 (2009).
- S. Debnath, M. Paul, and T. Debnath, Applications of lidar in agriculture and future research directions, J. Imaging 9, 57 (2023).
- F. Xue, W. Lu, Z. Chen, and C. J. Webster, From lidar point cloud towards digital twin city: Clustering city objects based on gestalt principles, ISPRS J. Photogramm. Remote Sens. 167, 418 (2020).
- E. Brock, C. Huang, D. Wu, and Y. Liang, Lidar-based real-time mapping for digital twin development, in Proceedings of the 2021 IEEE International Conference on Multimedia and Expo (ICME) (IEEE, Piscataway, NJ, 2021), pp. 1–6.
- H. Li, S. Chen, L. You, W. Meng, Z. Wu, Z. Zhang, K. Tang, L. Zhang, W. Zhang, X. Yang, X. Liu, Z. Wang, and X. Xie, Superconducting nanowire single photon detector at 532 nm and demonstration in satellite laser ranging, Opt. Express 24, 3535 (2016).
- L. Xue, Z. Li, L. Zhang, D. Zhai, Y. Li, S. Zhang, M. Li, L. Kang, J. Chen, P. Wu, and Y. Xiong, Satellite laser ranging using superconducting nanowire single-photon detectors at 1064 nm wavelength, Opt. Lett. 41, 3848 (2016).
- A. McCarthy, N. J. Krichel, N. R. Gemmell, X. Ren, M. G. Tanner, S. N. Dorenbos, V. Zwiller, R. H. Hadfield, and G. S. Buller, Kilometer-range, high resolution depth imaging via 1560 nm wavelength single-photon detection, Opt. Express 21, 8904 (2013).
- Z.-P. Li, J.-T. Ye, X. Huang, P.-Y. Jiang, Y. Cao, Y. Hong, C. Yu, J. Zhang, Q. Zhang, C.-Z. Peng, F. Xu, and J.-W. Pan, Single-photon imaging over 200 km, Optica 8, 344 (2021).
- A. McCarthy, G. G. Taylor, J. Garcia-Armenta, B. Korzh, D. V. Morozov, A. D. Beyer, R. M. Briggs, J. P. Allmaras, B. Bumble, M. Colangelo, D. Zhu, K. K. Berggren, M. D. Shaw, R. H. Hadfield, and G. S. Buller, High-resolution long-distance depth imaging lidar with ultra-low timing jitter superconducting nanowire single-photon detectors, Optica 12, 168 (2025).
- R. Tobin, A. Halimi, A. McCarthy, M. Laurenzis, F. Christnacher, and G. S. Buller, Three-dimensional single-photon imaging through obscurants, Opt. Express 27, 4590 (2019).
- A. M. Wallace, A. Halimi, and G. S. Buller, Full waveform lidar for adverse weather conditions, IEEE Trans. Veh. Technol. 69, 7064 (2020).
- X. Liu, I. Guillén, M. La Manna, J. H. Nam, S. A. Reza, T. Huu Le, A. Jarabo, D. Gutierrez, and A. Velten, Non-line-of-sight imaging using phasor-field virtual wave optics, Nature (London) 572, 620 (2019).
- A. Kirmani, D. Venkatraman, D. Shin, A. Colaço, F. N. C. Wong, J. H. Shapiro, and V. K. Goyal, First-photon imaging, Science 343, 58 (2014).
- B. Behroozpour, P. A. M. Sandborn, M. C. Wu, and B. E. Boser, Lidar system architectures and circuits, IEEE Commun. Mag. 55, 135 (2017).
- R. H. Hadfield, J. Leach, F. Fleming, D. J. Paul, C. H. Tan, J. S. Ng, R. K. Henderson, and G. S. Buller, Single-photon detection for long-range imaging and sensing, Optica 10, 1124 (2023).
- Y. Guan, H. Li, L. Xue, R. Yin, L. Zhang, H. Wang, G. Zhu, L. Kang, J. Chen, and P. Wu, Lidar with superconducting nanowire single-photon detectors: Recent advances and developments, Opt. Lasers Eng. 156, 107102 (2022).
- N. Li, C. P. Ho, J. Xue, L. W. Lim, G. Chen, Y. H. Fu, and L. Y. T. Lee, A progress review on solid-state lidar and nanophotonics-based lidar sensors, Laser Photon. Rev. 16, 2100511 (2022).
- N. Li, C. P. Ho, I.-T. Wang, P. Pitchappa, Y. H. Fu, Y. Zhu, and L. Y. T. Lee, Spectral imaging and spectral lidar systems: Moving toward compact nanophotonics-based sensing, Nanophoton. 10, 1437 (2021).
- C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, Superconducting nanowire single-photon detectors: Physics and applications, Supercond. Sci. Technol. 25, 063001 (2012).
- J. Wang, F. Sciarrino, A. Laing, and M. G. Thompson, Integrated photonic quantum technologies, Nat. Photon. 14, 273 (2020).
- G. Moody, V. J. Sorger, D. J. Blumenthal, P. W. Juodawlkis, W. Loh, C. Sorace-Agaskar, A. E. Jones, K. C. Balram, J. C. F. Matthews, A. Laing, M. Davanco, L. Chang, J. E. Bowers, N. Quack, C. Galland, I. Aharonovich, M. A. Wolff, C. Schuck, N. Sinclair, M. Lončar et al., 2022 roadmap on integrated quantum photonics, J. Phys. Photon. 4, 012501 (2022).
- W. Pernice, C. Schuck, O. Minaeva, M. Li, G. Goltsman, A. Sergienko, and H. Tang, High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits, Nat. Commun. 3, 1325 (2012).
- S. Ferrari, C. Schuck, and W. Pernice, Waveguide-integrated superconducting nanowire single-photon detectors, Nanophoton. 7, 1725 (2018).
- M. A. Wolff, S. Vogel, L. Splitthoff, and C. Schuck, Superconducting nanowire single-photon detectors integrated with tantalum pentoxide waveguides, Sci. Rep. 10, 17170 (2020).
- C. Schuck, W. H. P. Pernice, and H. X. Tang, Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate, Sci. Rep. 3, 1893 (2013).
- J. Tiedau, E. Meyer-Scott, T. Nitsche, S. Barkhofen, T. J. Bartley, and C. Silberhorn, A high dynamic range optical detector for measuring single photons and bright light, Opt. Express 27, 1 (2019).
- I. Craiciu, B. Korzh, A. D. Beyer, A. Mueller, J. P. Allmaras, L. Narváez, M. Spiropulu, B. Bumble, T. Lehner, E. E. Wollman, and M. D. Shaw, High-speed detection of 1550 nm single photons with superconducting nanowire detectors, Optica 10, 183 (2023).
- A. N. Bugge, S. Sauge, A. M. M. Ghazali, J. Skaar, L. Lydersen, and V. Makarov, Laser damage helps the eavesdropper in quantum cryptography, Phys. Rev. Lett. 112, 070503 (2014).
- G. G. Taylor, A. McCarthy, B. Korzh, A. D. Beyer, D. Morozov, R. M. Briggs, J. P. Allmaras, B. Bumble, M. D. Shaw, R. H. Hadfield, and G. S. Buller, Long-range depth imaging with 13 ps temporal resolution using a superconducting nanowire singlephoton detector, in Conference on Lasers and Electro-Optics (CLEO) (Optica Publishing Group, Washington, DC, 2020), p. SM2M.6.
- C. Schuck, W. H. P. Pernice, X. Ma, and H. X. Tang, Optical time domain reflectometry with low noise waveguide-coupled superconducting nanowire single-photon detectors, Appl. Phys. Lett. 102, 191104 (2013).
- B. Korzh, Q.-Y. Zhao, J. P. Allmaras, S. Frasca, T. M. Autry, E. A. Bersin, A. D. Beyer, R. M. Briggs, B. Bumble, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, A. E. Lita, F. Marsili, G. Moody, C. Peña, E. Ramirez, J. D. Rezac, N. Sinclair et al., Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector, Nat. Photon. 14, 250 (2020).
- F. Marsili, F. Bellei, F. Najafi, A. E. Dane, E. A. Dauler, R. J. Molnar, and K. K. Berggren, Efficient single photon detection from 500 nm to wavelength, Nano Lett. 12, 4799 (2012).
- M. A. Wolff, F. Beutel, J. Schütte, H. Gehring, M. Häußler, W. Pernice, and C. Schuck, Broadband waveguide-integrated superconducting single-photon detectors with high system detection efficiency, Appl. Phys. Lett. 118, 154004 (2021).
- G. G. Taylor, A. B. Walter, B. Korzh, B. Bumble, S. R. Patel, J. P. Allmaras, A. D. Beyer, R. O'Brient, M. D. Shaw, and E. E. Wollman, Low-noise single-photon counting superconducting nanowire detectors at infrared wavelengths up to , Optica 10, 1672 (2023).
- M. Sidorova, A. Semenov, H.-W. Hübers, I. Charaev, A. Kuzmin, S. Doerner, and M. Siegel, Physical mechanisms of timing jitter in photon detection by current-carrying superconducting nanowires, Phys. Rev. B 96, 184504 (2017).
- A. G. Kozorezov, C. Lambert, F. Marsili, M. J. Stevens, V. B. Verma, J. P. Allmaras, M. D. Shaw, R. P. Mirin, and S. W. Nam, Fano fluctuations in superconducting-nanowire single-photon detectors, Phys. Rev. B 96, 054507 (2017).
- J. Allmaras, A. Kozorezov, B. Korzh, K. Berggren, and M. Shaw, Intrinsic timing jitter and latency in superconducting nanowire single-photon detectors, Phys. Rev. Appl. 11, 034062 (2019).
- N. Calandri, Q.-Y. Zhao, D. Zhu, A. Dane, and K. K. Berggren, Superconducting nanowire detector jitter limited by detector geometry, Appl. Phys. Lett. 109, 152601 (2016).
- K. L. Nicolich, C. Cahall, N. T. Islam, G. P. Lafyatis, J. Kim, A. J. Miller, and D. J. Gauthier, Universal model for the turn-on dynamics of superconducting nanowire single-photon detectors, Phys. Rev. Appl. 12, 034020 (2019).
- R. Jaha, C. A. Graham-Scott, A. S. Abazi, W. Pernice, C. Schuck, and S. Ferrari, Kinetic inductance and jitter dependence of the intrinsic photon number resolution in superconducting nanowire single-photon detectors, arXiv:2410.23162.
- A. Semenov, A. Engel, H.-W. Hübers, K. Il'in, and M. Siegel, Spectral cut-off in the efficiency of the resistive state formation caused by absorption of a single-photon in current-carrying superconducting nano-strips, Eur. Phys. J. B 47, 495 (2005).
- M. Hofherr, D. Rall, K. S. Ilin, A. Semenov, N. Gippius, H.-W. Hübers, and M. Siegel, Superconducting nanowire single-photon detectors: Quantum efficiency vs film thickness, J. Phys.: Conf. Ser. 234, 012017 (2010).
- I. Esmaeil Zadeh, J. Chang, J. W. N. Los, S. Gyger, A. W. Elshaari, S. Steinhauer, S. N. Dorenbos, and V. Zwiller, Superconducting nanowire single-photon detectors: A perspective on evolution, state-of-the-art, future developments, and applications, Appl. Phys. Lett. 118, 190502 (2021).
- F. Beutel, T. Grottke, M. A. Wolff, C. Schuck, and W. H. P. Pernice, Cryo-compatible opto-mechanical low-voltage phase-modulator integrated with superconducting single-photon detectors, Opt. Express 30, 30066 (2022).
- M. Häußler, R. Terhaar, M. A. Wolff, H. Gehring, F. Beutel, W. Hartmann, N. Walter, M. Tillmann, M. Ahangarianabhari, M. Wahl, T. Röhlicke, H.-J. Rahn, W. H. P. Pernice, and C. Schuck, Scaling waveguide-integrated superconducting nanowire single-photon detector solutions to large numbers of independent optical channels, Rev. Sci. Instrum. 94, 013103 (2023).
- M. Sidorova, A. Semenov, H.-W. Hübers, A. Kuzmin, S. Doerner, K. Ilin, M. Siegel, I. Charaev, and D. Vodolazov, Timing jitter in photon detection by straight superconducting nanowires: Effect of magnetic field and photon flux, Phys. Rev. B 98, 134504 (2018).
- T. Staffas, A. Elshaari, and V. Zwiller, Frequency modulated continuous wave and time of flight lidar with single photons: A comparison, Opt. Express 32, 7332 (2024).
- G. Sauer, M. Kolarczik, R. Gomez, J. Conrad, and F. Steinlechner, Resolving photon numbers using ultra-high-resolution timing of a single low-jitter superconducting nanowire detector, arXiv:2310.12472.
- T. Grottke, W. Hartmann, C. Schuck, and W. H. P. Pernice, Optoelectromechanical phase shifter with low insertion loss and a tuning range, Opt. Express 29, 5525 (2021).
- E. Lomonte, M. A. Wolff, F. Beutel, S. Ferrari, C. Schuck, W. H. P. Pernice, and F. Lenzini, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Nat. Commun. 12, 6847 (2021).
- A. S. Abazi, C. Schuck, and C. A. Graham-Scott, Multi-photon enhanced resolution for SNSPD-based time-of-flight lidar systems, Datastore by University Münster (2025), https://doi.org/10.17879/93958526317.