• Accepted Paper

Enhanced performance tunability of YBa2Cu3O7−δ films via pulsed laser deposition with a variable target-to-substrate distance at high laser fluences

Simone E. Cunzolo, Cankut Eker, and Alexey V. Pan

Phys. Rev. Materials - Accepted 23 September, 2026

DOI: https://doi.org/10.1103/zxb2-z39d

Abstract

The established guiding principle for pulsed laser deposition (PLD) of high-quality YBa2Cu3O7−x (YBCO) superconducting films suggests that the optimal target-to-substrate distance (TSD) lies near the visible tip of the laser-induced plume, with deviations from this point expected to degrade film properties. We modified our PLD system to allow precise external TSD adjustment over a 110 mm range and systematically studied its influence on the microstructure and electromagnetic properties of YBCO thin films. Our analysis, referencing plume propagation models and growth processes, reveals that the optimal TSD range can, in fact, be extended under a relatively high laser fluence, depending on the desired film performance and properties. We identify four TSD regimes, each exhibiting unique film characteristics. Notably, we demonstrate that high-quality superconducting properties and crystallinity are preserved across a broad 50 mm TSD window, yielding films with variable thickness and surface structures. This tunability enhances the potential for applications in electronics and high power handling, where tailored combinations of surface structure and/or electromagnetic properties is required. Furthermore, we propose that TSD-dependent variations in flux and growth rate provide a straightforward and effective approach to probe plume (plasma) composition during laser ablation, offering new insights into deposition dynamics.

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