• Accepted Paper

Scandium occupancy and unique extended defect formation in alloyed β-(ScxGa1−x)2O3 single crystals

Andrew R. Balog, Channyung Lee, Jani Jesenovec, Leixin Miao, Benjamin L. Dutton, John S. McCloy, Elif Ertekin, and Nasim Alem

Phys. Rev. Materials - Accepted 24 September, 2026

DOI: https://doi.org/10.1103/x8px-56tv

Abstract

A range of alloying candidates have been identified for beta gallium oxide (β-Ga2O3) as a means of tuning its electronic properties, primarily the band gap. Scandium has been recognized as a promising alloying candidate, but its effect on β-Ga2O3’s electronic, structural, and defect behavior must be better understood to enable further development. Here, Czochralski-grown (100) β-(Sc0.06Ga0.94)2O3 crystals were investigated using atomic-resolution scanning transmission electron microscopy, monochromated electron energy loss spectroscopy, and first-principles simulations. These results show that Sc preferentially occupies octahedral Ga sites, and increases the material’s band gap from 4.8 eV to 4.92 eV when alloyed with 10 mol % Sc. It is also demonstrated that the alloying of Sc can result in unique extended defect formation in both intrinsic and mechanically deformed β-(Sc0.06Ga0.94)2O3. The structure of a unique planar defect in the as-grown crystal was determined to be a set of closely spaced, (100)-oriented stacking faults resulting in a unique atomic projection. Mechanical deformation of the crystal, performed to help understand intrinsic defect structure, resulted in the identification of a new atomic configuration within a stacking fault heavily influenced by local strain, which we term a “strained stacking fault”. No widespread formation of point defects or dislocations was observed in the as-grown crystal. These results reveal the ability for unique extended defects, such as multiple stacking faults in close proximity, to be formed in β-Ga2O3 systems when alloyed. These findings provide insight into the potential of β-(ScxGa1-x)2O3 alloys to produce substrates with a range of electronic and structural properties, enabling further development of β-Ga2O3 for next generation power semiconductor applications.

Export citation

Export citation

Choose format for download:

Download Citation

If the author has provided any supplemental materials with this article they will be available upon publication of the version of record.

Sign In to Your Journals Account

Filter

Filter

Article Lookup

Enter a citation