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Beyond turbostratic disorder: Towards epitaxial alignment in Bi2Se3/MoSe2 van-der-Waals bilayer stacks grown from amorphous elemental precursors

Fabian Göhler1,2,3,4,*, Fabian Ganss1,5, Aalaa Osman1, Olav Hellwig1,2,5, David C. Johnson3, and Thomas Seyller1,2

  • *Contact author: fabian.goehler@physik.tu-chemnitz.de

Phys. Rev. Materials 9, 074005 – Published 18 July, 2025

DOI: https://doi.org/10.1103/wn8y-xvyh

Abstract

Bottom-up synthetic approaches to synthesize stacks of individual quasi-two-dimensional materials remain a major experimental challenge. Here, we evaluate the applicability of the little-known technique of modulated elemental reactants (MER) for the synthesis of one-unit-cell-thick Bi2Se3/MoSe2 bilayer stacks via the self-assembly of amorphous elemental Bi|Se and Mo|Se precursors. Using a two-step annealing approach, both layers can be crystallized in a single heterostructure, as evidenced by a combination of x-ray photoelectron spectroscopy, Raman spectroscopy, and x-ray diffraction. However, we observe a limited stability of the Bi2Se3 layer, reflected in its partial decomposition under conditions required to crystallize MoSe2. The choice of substrate proves to be a crucial piece to control the thin film growth: We demonstrate the evolution of larger-scale epitaxial alignment within a heterostructure grown via MER by low-energy electron diffraction.

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References (72)

  1. K. V. Emtsev, A. Bostwick, K. Horn, J. Jobst, G. L. Kellogg, L. Ley, J. L. McChesney, T. Ohta, S. A. Reshanov, J. Röhrl, E. Rotenberg, A. K. Schmid, D. Waldmann, H. B. Weber, and T. Seyller, Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide, Nat. Mater. 8, 203 (2009).
  2. C. Muratore, A. A. Voevodin, and N. R. Glavin, Physical vapor deposition of 2D van der Waals materials: A review, Thin Solid Films 688, 137500 (2019).
  3. T. Kang, T. W. Tang, B. Pan, H. Liu, K. Zhang, and Z. Luo, Strategies for controlled growth of transition metal dichalcogenides by chemical vapor deposition for integrated electronics, ACS Mater. Au 2, 665 (2022).
  4. J. Li, S. Wang, L. Li, Z. Wei, Q. Wang, H. Sun, J. Tian, Y. Guo, J. Liu, H. Yu, N. Li, G. Long, X. Bai, W. Yang, R. Yang, D. Shi, and G. Zhang, Chemical vapor deposition of 4-inch wafer Scale Monolayer MoSe2, Small Science 2, 2200062 (2022).
  5. J. Li, J. Liang, X. Yang, X. Li, B. Zhao, B. Li, and X. Duan, Controllable preparation of 2D vertical van der Waals heterostructures and superlattices for functional applications, Small 18, 2107059 (2022).
  6. D. Fu, X. Zhao, Y.-Y. Zhang, L. Li, H. Xu, A.-R. Jang, S. I. Yoon, P. Song, S. M. Poh, T. Ren, Z. Ding, W. Fu, T. J. Shin, H. S. Shin, S. T. Pantelides, W. Zhou, and K. P. Loh, Molecular beam epitaxy of highly crystalline monolayer molybdenum disulfide on hexagonal boron nitride, J. Am. Chem. Soc. 139, 9392 (2017).
  7. W. Pacuski, M. Grzeszczyk, K. Nogajewski, A. Bogucki, K. Oreszczuk, J. Kucharek, K. E. Połczyńska, B. Seredyński, A. Rodek, R. Bożek, T. Taniguchi, K. Watanabe, S. Kret, J. Sadowski, T. Kazimierczuk, M. Potemski, and P. Kossacki, Narrow excitonic lines and large-scale homogeneity of transition-metal dichalcogenide monolayers grown by molecular beam epitaxy on hexagonal boron nitride, Nano Lett. 20, 3058 (2020).
  8. J. E. Brom, L. Weiss, T. H. Choudhury, and J. M. Redwing, Hybrid physical–chemical vapor deposition of Bi2Se3 films, J. Cryst. Growth 452, 230 (2016).
  9. P. Tabor, C. Keenan, S. Urazhdin, and D. Lederman, Molecular beam epitaxy and characterization of thin Bi2Se3 films on Al2O3(110), Appl. Phys. Lett. 99, 013111 (2011).
  10. L. He, F. Xiu, Y. Wang, A. V. Fedorov, G. Huang, X. Kou, M. Lang, W. P. Beyermann, J. Zou, and K. L. Wang, Epitaxial growth of Bi2Se3 topological insulator thin films on Si(111), J. Appl. Phys. 109, 103702 (2011).
  11. X. F. Kou, L. He, F. X. Xiu, M. R. Lang, Z. M. Liao, Y. Wang, A. V. Fedorov, X. X. Yu, J. S. Tang, G. Huang, X. W. Jiang, J. F. Zhu, J. Zou, and K. L. Wang, Epitaxial growth of high mobility Bi2Se3 thin films on CdS, Appl. Phys. Lett. 98, 242102 (2011).
  12. G. Zhang, H. Qin, J. Teng, J. Guo, Q. Guo, X. Dai, Z. Fang, and K. Wu, Quintuple-layer epitaxy of thin films of topological insulator Bi2Se3, Appl. Phys. Lett. 95, 053114 (2009).
  13. A. Richardella, D. M. Zhang, J. S. Lee, A. Koser, D. W. Rench, A. L. Yeats, B. B. Buckley, D. D. Awschalom, and N. Samarth, Coherent heteroepitaxy of Bi2Se3 on GaAs (111)B, Appl. Phys. Lett. 97, 262104 (2010).
  14. T.-H. Kim, J. H. Baeck, H. Choi, K.-H. Jeong, M.-H. Cho, B. C. Kim, and K. T. Jeong, Phase transformation of alternately layered Bi/Se structures to well-ordered single crystalline Bi2Se3 structures by a self-organized ordering process, J. Phys. Chem. C 116, 3737 (2012).
  15. J. Chae, S.-H. Kang, Y.-K. Kwon, and M.-H. Cho, Suppression of the hybridization of surface states and transport property in ultrathin Bi2Se3/graphene heterostructure, Appl. Sci. Converg. Technol. 28, 207 (2019).
  16. H. Guo, Z. Hu, Z. Liu, and J. Tian, Stacking of 2D materials, Adv. Funct. Mater. 31, 2007810 (2020).
  17. A. Castellanos-Gomez, X. Duan, Z. Fei, H. R. Gutierrez, Y. Huang, X. Huang, J. Quereda, Q. Qian, E. Sutter, and P. Sutter, Van der Waals heterostructures, Nat. Rev. Methods Primers 2, 58 (2022).
  18. D. C. Johnson, Controlled synthesis of new compounds using modulated elemental reactants, Curr. Opin. Solid State Mater. Sci. 3, 159 (1998).
  19. M. Noh, C. D. Johnson, M. D. Hornbostel, J. Thiel, and D. C. Johnson, Control of reaction pathway and the nanostructure of final products through the design of modulated elemental reactants, Chem. Mater. 8, 1625 (1996).
  20. D. M. Hamann, D. Bardgett, D. L. M. Cordova, L. A. Maynard, E. C. Hadland, A. C. Lygo, S. R. Wood, M. Esters, and D. C. Johnson, Sub-monolayer accuracy in determining the number of atoms per unit area in ultrathin films using X-ray fluorescence, Chem. Mater. 30, 6209 (2018).
  21. A. M. Miller and D. C. Johnson, Challenges in synthesis of heterostructures, J. Mater. Chem. C 10, 6546 (2022).
  22. M. Beekman, C. L. Heideman, and D. C. Johnson, Ferecrystals: Non-epitaxial layered intergrowths, Semicond. Sci. Technol. 29, 064012 (2014).
  23. D. L. M. Cordova and D. C. Johnson, Synthesis of metastable inorganic solids with extended structures, ChemPhysChem 21, 1345 (2020).
  24. M. Esters, M. B. Alemayehu, Z. Jones, N. T. Nguyen, M. D. Anderson, C. Grosse, S. F. Fischer, and D. C. Johnson, Synthesis of inorganic structural isomers by diffusion-constrained self-assembly of designed precursors: A novel type of isomerism, Angew. Chem. Int. Ed. 54, 1130 (2015).
  25. E. C. Hadland, H. Jang, N. Wolff, R. Fischer, A. C. Lygo, G. Mitchson, D. Li, L. Kienle, D. G. Cahill, and D. C. Johnson, Ultralow thermal conductivity of turbostratically disordered MoSe2 ultra-thin films and implications for heterostructures, Nanotechnology 30, 285401 (2019).
  26. F. Göhler, E. C. Hadland, C. Schmidt, D. R. T. Zahn, F. Speck, D. C. Johnson, and T. Seyller, Growth of nanocrystalline MoSe2 monolayers on epitaxial graphene from amorphous precursors, Phy. Status Solidi B 256, 1800283 (2019).
  27. F. Harvel, M. Lemon, R. N. Gannon, D. Bardgett, M. Humphrey, and D. C. Johnson, Investigation of the Pb–Fe–Se ternary system and the synthesis of a ternary Pb1−xFex Se phase, Chem. Mater. 34, 6339 (2022).
  28. A. C. Lygo, D. M. Hamann, D. B. Moore, D. R. Merrill, J. Ditto, M. Esters, J. Orlowicz, S. R. Wood, and D. C. Johnson, Kinetically controlled formation and decomposition of metastable [(BiSe)1+δ]m[TiSe2]m compounds, J. Am. Chem. Soc. 140, 3385 (2018).
  29. M. Lemon, F. G. Harvel, R. N. Gannon, P. Lu, S. P. Rudin, and D. C. Johnson, Targeted synthesis of predicted metastable compounds using modulated elemental reactants, J. Vac. Sci. Technol. A 41, 022203 (2023).
  30. C. Chiritescu, D. G. Cahill, N. Nguyen, D. C. Johnson, A. Bodapati, P. Keblinski, and P. Zschack, Ultralow thermal conductivity in disordered, layered WSe2 crystals, Science 315, 351 (2007).
  31. E. Hadland, H. Jang, M. Falmbigl, R. Fischer, D. L. Medlin, D. G. Cahill, and D. C. Johnson, Synthesis, characterization, and ultralow thermal conductivity of a lattice-mismatched SnSe2(MoSe2)1.32 heterostructure, Chem. Mater. 31, 5699 (2019).
  32. F. Göhler, G. Mitchson, M. B. Alemayehu, F. Speck, M. Wanke, D. C. Johnson, and T. Seyller, Charge transfer in (PbSe)1+δ(NbSe2)2 and (SnSe)1+δ(NbSe2)2 ferecrystals investigated by photoelectron spectroscopy, J. Phys.: Condens. Matter 30, 055001 (2018).
  33. F. Göhler, D. M. Hamann, N. Rösch, S. Wolff, J. T. Logan, R. Fischer, F. Speck, D. C. Johnson, and T. Seyller, Electronic structure of designed [(SnSe)1+δ]m[TiSe2]2 heterostructure thin films with tunable layering sequence, J. Mater. Res. 34, 1965 (2019).
  34. F. Göhler, S. Ramasubramanian, S. K. Rajak, N. Rösch, A. Schütze, S. Wolff, D. L. M. Cordova, D. C. Johnson, and T. Seyller, Modulation doping and charge density wave transition in layered PbSe-VSe2 ferecrystal heterostructures, Nanoscale 14, 10143 (2022).
  35. E. C. Hadland, F. Göhler, G. Mitchson, S. S. Fender, C. Schmidt, D. R. T. Zahn, T. Seyller, and D. C. Johnson, Synthesis and properties of (BiSe)0.97MoSe2: A heterostructure containing both 2H–MoSe2 and 1T–MoSe2, Chem. Mater. 31, 5824 (2019).
  36. F. Göhler, M. A. Choffel, C. Schmidt, D. R. T. Zahn, D. C. Johnson, and T. Seyller, Influence of nanoarchitectures on interlayer interactions in layered Bi–Mo–Se heterostructures, J. Phys. Chem. C 125, 9469 (2021).
  37. M. A. Choffel, R. N. Gannon, F. Göhler, A. M. Miller, D. L. Medlin, T. Seyller, and D. C. Johnson, Synthesis and electrical properties of a new compound (BiSe)0.97(Bi2Se3)1.26(BiSe)0.97(MoSe2) containing metallic 1T-MoSe2, Chem. Mater. 33, 6403 (2021).
  38. R. Kappera, D. Voiry, S. E. Yalcin, B. Branch, G. Gupta, A. D. Mohite, and M. Chhowalla, Phase-engineered low-resistance contacts for ultrathin MoS2 transistors, Nat. Mater. 13, 1128 (2014).
  39. M. A. Choffel, T. M. Kam, and D. C. Johnson, Substituent effects in the synthesis of heterostructures, Inorg. Chem. 60, 9598 (2021).
  40. S. Vishwanath, X. Liu, S. Rouvimov, L. Basile, N. Lu, A. Azcatl, K. Magno, R. M. Wallace, M. Kim, J.-C. Idrobo, J. K. Furdyna, D. Jena, and H. G. Xing, Controllable growth of layered selenide and telluride heterostructures and superlattices using molecular beam epitaxy, J. Mater. Res. 31, 900 (2016).
  41. E. Xenogiannopoulou, P. Tsipas, K. E. Aretouli, D. Tsoutsou, S. A. Giamini, C. Bazioti, G. P. Dimitrakopulos, P. Komninou, S. Brems, C. Huyghebaert, I. P. Radu, and A. Dimoulas, High-quality, large-area MoSe2 and MoSe2/Bi2Se3 heterostructures on AlN(0001)/Si(111) substrates by molecular beam epitaxy, Nanoscale 7, 7896 (2015).
  42. D. L. M. Cordova, T. M. Kam, R. N. Gannon, P. Lu, and D. C. Johnson, Controlling the self-assembly of new metastable tin vanadium selenides using composition and nanoarchitecture of precursors, J. Am. Chem. Soc. 142, 13145 (2020).
  43. P. Tonndorf, R. Schmidt, P. Böttger, X. Zhang, J. Börner, A. Liebig, M. Albrecht, C. Kloc, O. Gordan, D. R. T. Zahn, S. M. de Vasconcellos, and R. Bratschitsch, Photoluminescence emission and Raman response of monolayer MoS2, MoSe2, and WSe2, Opt. Express 21, 4908 (2013).
  44. J. C. Shaw, H. Zhou, Y. Chen, N. O. Weiss, Y. Liu, Y. Huang, and X. Duan, Chemical vapor deposition growth of monolayer MoSe2 nanosheets, Nano Res. 7, 511 (2014).
  45. M. M. Ugeda, A. J. Bradley, S.-F. Shi, F. H. da Jornada, Y. Zhang, D. Y. Qiu, W. Ruan, S.-K. Mo, Z. Hussain, Z.-X. Shen, F. Wang, S. G. Louie, and M. F. Crommie, Giant bandgap renormalization and excitonic effects in a monolayer transition metal dichalcogenide semiconductor, Nat. Mater. 13, 1091 (2014).
  46. J. Zhang, Z. Peng, A. Soni, Y. Zhao, Y. Xiong, B. Peng, J. Wang, M. S. Dresselhaus, and Q. Xiong, Raman spectroscopy of few-quintuple layer topological insulator Bi2Se3 nanoplatelets, Nano Lett. 11, 2407 (2011).
  47. W. Dang, H. Peng, H. Li, P. Wang, and Z. Liu, Epitaxial heterostructures of ultrathin topological insulator nanoplate and graphene, Nano Lett. 10, 2870 (2010).
  48. M. Eddrief, P. Atkinson, V. Etgens, and B. Jusserand, Low-temperature Raman fingerprints for few-quintuple layer topological insulator Bi2Se3 films epitaxied on GaAs, Nanotechnology 25, 245701 (2014).
  49. U. Gupta, B. S. Naidu, U. Maitra, A. Singh, S. N. Shirodkar, U. V. Waghmare, and C. N. R. Rao, Characterization of few-layer 1T-MoSe2 and its superior performance in the visible-light induced hydrogen evolution reaction, APL Mater. 2, 092802 (2014).
  50. C. Grosse, M. B. Alemayehu, M. Falmbigl, A. Mogilatenko, O. Chiatti, D. C. Johnson, and S. F. Fischer, Superconducting ferecrystals: Turbostratically disordered atomic-scale layered (PbSe)1.14(NbSe2)n thin films, Sci. Rep. 6, 33457 (2016).
  51. See Supplemental Material at http://link.aps.org/supplemental/10.1103/wn8y-xvyh for additional XP spectra, LEED patterns, XRD scans, and AFM analysis.
  52. K. V. Emtsev, F. Speck, T. Seyller, L. Ley, and J. D. Riley, Interaction, growth, and ordering of epitaxial graphene on SiC{0001} surfaces: A comparative photoelectron spectroscopy study, Phys. Rev. B 77, 155303 (2008).
  53. C. H. Park, B.-H. Cheong, K.-H. Lee, and K. J. Chang, Structural and electronic properties of cubic, 2H, 4H, and 6H SiC, Phys. Rev. B 49, 4485 (1994).
  54. T. Böker, R. Severin, A. Müller, C. Janowitz, R. Manzke, D. Voß, P. Krüger, A. Mazur, and J. Pollmann, Band structure of Mo2, MoSe2, and α−MoTe2: Angle-resolved photoelectron spectroscopy and ab initio calculations, Phys. Rev. B 64, 235305 (2001).
  55. V. Boechko and V. Isarev, Crystallization conditions and properties of single crystals of p-type Bi2Se3, Izv. Akad. Nauk SSSR, Neorg. Mater. 11, 1510 (1975).
  56. F. Göhler, Oberflächenphysikalische Untersuchungen an ferekristallinen Dünnschichten und van-der-Waals Heterostrukturen, Ph.D. thesis, Technische Universität Chemnitz, 2022.
  57. G. F. Harrington and J. Santiso, Back-to-basics tutorial: X-ray diffraction of thin films, J. Electroceram. 47, 141 (2021).
  58. M. Birkholz, Thin Film Analysis by X-Ray Scattering (Wiley-VCH, Weinheim, 2006).
  59. D. M. Hamann, D. R. Merrill, S. R. Bauers, G. Mitchson, J. Ditto, S. P. Rudin, and D. C. Johnson, Long-range order in [(SnSe)1.2]1[TiSe2]1 prepared from designed precursors, Inorg. Chem. 56, 3499 (2017).
  60. M. Kruskopf, D. M. Pakdehi, K. Pierz, S. Wundrack, R. Stosch, T. Dziomba, M. Götz, J. Baringhaus, J. Aprojanz, C. Tegenkamp, J. Lidzba, T. Seyller, F. Hohls, F. J. Ahlers, and H. W. Schumacher, Comeback of epitaxial graphene for electronics: Large-area growth of bilayer-free graphene on SiC, 2D Mater. 3, 041002 (2016).
  61. S. Wang, Y. Rong, Y. Fan, M. Pacios, H. Bhaskaran, K. He, and J. H. Warner, Shape evolution of monolayer MoS2 crystals grown by chemical vapor deposition, Chem. Mater. 26, 6371 (2014).
  62. W. A. Abdallah and A. E. Nelson, Characterization of MoSe2(0001) and ion-sputtered MoSe2 by XPS, J. Mater. Sci. 40, 2679 (2005).
  63. J. Scofield, Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV, J. Electron Spectrosc. Relat. Phenom. 8, 129 (1976).
  64. S. Tanuma, C. J. Powell, and D. R. Penn, Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50-2000 eV range, Surf. Interface Anal. 21, 165 (1994).
  65. L. V. Yashina, J. Sánchez-Barriga, M. R. Scholz, A. A. Volykhov, A. P. Sirotina, V. S. Neudachina, M. E. Tamm, A. Varykhalov, D. Marchenko, G. Springholz, G. Bauer, A. Knop-Gericke, and O. Rader, Negligible surface reactivity of topological insulators Bi2Se3 and Bi2Te3 towards oxygen and water, ACS Nano 7, 5181 (2013).
  66. O. E. Tereshchenko, K. A. Kokh, V. V. Atuchin, K. N. Romanyuk, S. V. Makarenko, V. A. Golyashov, A. S. Kozhukhov, I. P. Prosvirin, and A. A. Shklyaev, Stability of the (0001) surface of the Bi2Se3 topological insulator, JETP Lett. 94, 465 (2011).
  67. V. A. Golyashov, K. A. Kokh, S. V. Makarenko, K. N. Romanyuk, I. P. Prosvirin, A. V. Kalinkin, O. E. Tereshchenko, A. S. Kozhukhov, D. V. Sheglov, S. V. Eremeev, S. D. Borisova, and E. V. Chulkov, Inertness and degradation of (0001) surface of Bi2Se3 topological insulator, J. Appl. Phys. 112, 113702 (2012).
  68. Y. N. Zhang, Communication: Surface stability and topological surface states of cleaved Bi2Se3: First-principles studies, J. Chem. Phys. 143, 151101 (2015).
  69. P. Tsipas, E. Xenogiannopoulou, S. Kassavetis, D. Tsoutsou, E. Golias, C. Bazioti, G. P. Dimitrakopulos, P. Komninou, H. Liang, M. Caymax, and A. Dimoulas, Observation of surface Dirac cone in high-quality ultrathin epitaxial Bi2Se3 topological insulator on AlN(0001) dielectric, ACS Nano 8, 6614 (2014).
  70. M. T. Edmonds, J. T. Hellerstedt, A. Tadich, A. Schenk, K. M. O'Donnell, J. Tosado, N. P. Butch, P. Syers, J. Paglione, and M. S. Fuhrer, Stability and surface reconstruction of topological insulator Bi2Se3 on exposure to atmosphere, J. Phys. Chem. C 118, 20413 (2014).
  71. J. Buha, R. Gaspari, A. E. Del Rio Castillo, F. Bonaccorso, and L. Manna, Thermal stability and anisotropic sublimation of two-dimensional colloidal Bi2Te3 and Bi2Se3 nanocrystals, Nano Lett. 16, 4217 (2016).
  72. M. Ostler, F. Speck, M. Gick, and T. Seyller, Automated preparation of high-quality epitaxial graphene on 6H-SiC(0001), Phy. Status Solidi B 247, 2924 (2010).

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