- Accepted Paper
Role of local structural variation in x-ray photoelectron spectrum of silicon oxide interfaces
Phys. Rev. B - Accepted 14 October, 2026
DOI: https://doi.org/10.1103/7yqf-r5fr
Phys. Rev. B - Accepted 14 October, 2026
DOI: https://doi.org/10.1103/7yqf-r5fr
We show that the broad X‑ray photoelectron lines of silicon oxide on silicon arise from a continuous statistical distribution of core-level binding energies. Statistical simulations spanning compositions from Si to SiO reproduce the full extent of this broadening, reaching eV for SiO, in quantitative agreement with 0.23 nm layer-resolved spectra reconstructed from Ar sputtering data. This continuous distribution blurs distinct spectral fingerprints of local structural motifs, thereby challenging conventional chemical state assignment in oxide X-ray photoelectron spectra.
If the author has provided any supplemental materials with this article they will be available upon publication of the version of record.