• Accepted Paper

Role of local structural variation in x-ray photoelectron spectrum of silicon oxide interfaces

Mikael Santonen, Sari Granroth, Johanna Laaksonen, Pekka Laukkanen, and Johannes Niskanen

Phys. Rev. B - Accepted 14 October, 2026

DOI: https://doi.org/10.1103/7yqf-r5fr

Abstract

We show that the broad X‑ray photoelectron lines of silicon oxide on silicon arise from a continuous statistical distribution of core-level binding energies. Statistical simulations spanning compositions from Si to SiO2 reproduce the full extent of this broadening, reaching ∼5 eV for SiO1.0, in quantitative agreement with 0.23 nm layer-resolved spectra reconstructed from Ar+ sputtering data. This continuous distribution blurs distinct spectral fingerprints of local structural motifs, thereby challenging conventional chemical state assignment in oxide X-ray photoelectron spectra.

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