Origin of acceptor preference in silicon, diamond, and silicon carbide
Phys. Rev. B 114, 045203 – Published 15 July, 2026
DOI: https://doi.org/10.1103/wvrl-pmwt
Abstract
Silicon, diamond, and their compound silicon carbide play pivotal roles in electronic science and technology. Trivalent impurities such as B and Al are the typical choices for -type doping in these semiconductors. Intriguingly, B dominates in Si and diamond, while Al is preferred in SiC for industrial applications, despite their chemical similarity. Using first-principles calculations, we perform a comparative analysis of B- and Al-related defects across the three hosts. We show that in the elemental hosts, B is favored due to its lower orbital energy than Al orbital energy. In SiC, the ionicity leads to strong localization of the valence-band maximum on the C sublattice, rendering large perturbation and high acceptor level if substituting on the anion C site. At the cation Si site, Al exhibits a small size mismatch, a shallower transition level, and a lower formation energy, making it the more efficient dopant. Interstitial defects are either energetically unfavorable (in Si and diamond) or contribute similar compensation effects for B and Al (in SiC), and thus do not alter the observed trends. These results not only provide a unified atomistic explanation for acceptor doping in Si, diamond, and SiC, but also offer a physically transparent picture that links dopant efficiency to band-edge character, site preference, and lattice relaxation.