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Information limit of 15 picometers achieved with bright-field ptychography

Haozhi Sha, Jizhe Cui, Wenfeng Yang, and Rong Yu*

  • *Contact author: ryu@tsinghua.edu.cn

Phys. Rev. B 110, L060104 – Published 26 August, 2024

DOI: https://doi.org/10.1103/PhysRevB.110.L060104

Abstract

It is generally assumed that a high spatial resolution of a microscope requires a large numerical aperture of the imaging lens or detector. In this study, the information limit of 15 pm is achieved in transmission electron microscopy using only the bright-field disk (small numerical aperture) via multislice ptychography. The results indicate that high-frequency information has been encoded in the bright-field disk due to the multiple scattering of electrons in the objects, making it possible to break the diffraction limit of imaging via bright-field ptychography.

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