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Ferroelectric structural transition in hafnium oxide induced by charged oxygen vacancies

Ri He1,*, Hongyu Wu1,*, Shi Liu2, Houfang Liu3, and Zhicheng Zhong1,4,†

  • 1Key Laboratory of Magnetic Materials Devices & Zhejiang Province Key Laboratory of Magnetic Materials and Application Technology, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
  • 2School of Science, Westlake University, Hangzhou, Zhejiang 310024, China; Institute of Natural Sciences, Westlake Institute for Advanced Study, Hangzhou, Zhejiang 310024, China; and Key Laboratory for Quantum Materials of Zhejiang Province, Hangzhou Zhejiang 310024, China
  • 3Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
  • 4China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

  • *These autors contributed equally to this work.
  • †zhong@nimte.ac.cn

Phys. Rev. B 104, L180102 – Published 29 November, 2021

DOI: https://doi.org/10.1103/PhysRevB.104.L180102

Abstract

The discovery of ferroelectric HfO2 in thin films and more recently in bulk is an important breakthrough because of its silicon compatibility and unexpectedly persistent polarization at low dimensions, but the origin of its ferroelectricity is still under debate. The stabilization of the metastable polar orthorhombic phase was often considered as the cumulative result of various extrinsic factors such as stress, grain boundary, and oxygen vacancies as well as phase transition kinetics during the annealing process. We propose a mechanism to stabilize the polar orthorhombic phase over the nonpolar monoclinic phase that is the bulk ground state. Our first-principles calculations demonstrate that the doubly positively charged oxygen vacancy, an overlooked defect but commonly presenting in binary oxides, is critical for the stabilization of the ferroelectric phase. The charge state of the oxygen vacancy serves as a degree of freedom to control the thermodynamic stability of competing phases of wide band gap oxides.

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