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Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors

A. Hochreiter1,*, P. Bredol2,*, F. David2, B. Demiralp2, H.B. Weber1, and E.M. Weig2,3,4,†

  • *These authors contributed equally to this work.
  • †Contact author: eva.weig@tum.de

Huan-Huan 欢欢 Cheng 程, Chen-Rui 晨锐 Yang 杨, Gao-Feng 高锋 Jiao 焦, Cheng-Hua 成华 Bai 白, and Shao-Xiong 少雄 Wu 武

Chinese Phys. B 35 040311 (2026)

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