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Gigahertz-frequency Lamb-wave resonator cavities on suspended lithium niobate for quantum acoustics

Michele Diego1,*,†, Hong Qiao2,†, Byunggi Kim1,3, Minseok Ryu2, Shiheng Li4, Gustav Andersson2,‡, Masahiro Nomura1,§, and Andrew N. Cleland2,∥

  • *Contact author: diego@iis.u-tokyo.ac.jp
  • †These authors contributed equally to this work.
  • ‡Present address: IBM Quantum, IBM T.J. Watson Research Center, Yorktown Heights, New York 10598, USA.
  • §Contact author: nomura@iis.u-tokyo.ac.jp
  • ∥Contact author: anc@uchicago.edu

Phys. Rev. Applied 26, 014045 – Published 15 July, 2026

DOI: https://doi.org/10.1103/xt9r-h1q9

Abstract

Phononic nanodevices offer a promising route toward quantum technologies, as phonons combine strong confinement within matter with broad coupling capabilities to various quantum systems. In particular, the piezoelectric response of materials, such as lithium niobate, enables coupling between superconducting qubits and gigahertz-frequency phonons. However, bulk lithium niobate phononic devices typically rely on surface acoustic waves and are therefore inherently subject to leakage from the surface into the bulk substrate. Here, we explore the acoustic behavior of resonator cavities supporting GHz-frequency Lamb waves in a 200-nm-thick suspended lithium niobate layer. We characterize the acoustic response at both room and millikelvin temperatures. We find that our resonator cavities with strong confinement reach intrinsic quality factors of approximately 6000 at the single phonon level. We use the measured parameters of the resonators to model their coupling to a superconducting transmon qubit, allowing us to evaluate their potential as quantum acoustic devices.

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References (45)

  1. G. S. MacCabe, H. Ren, J. Luo, J. D. Cohen, H. Zhou, A. Sipahigil, M. Mirhosseini, and O. Painter, Nano-acoustic resonator with ultralong phonon lifetime, Science 370, 840 (2020).
  2. M. Tuokkola, Y. Sunada, H. Kivijärvi, J. Albanese, L. Grönberg, J.-P. Kaikkonen, V. Vesterinen, J. Govenius, and M. Möttönen, Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit, Nat. Commun. 16, 5421 (2025).
  3. A. D. O’Connell, M. Hofheinz, M. Ansmann, R. C. Bialczak, M. Lenander, E. Lucero, M. Neeley, D. Sank, H. Wang, M. Weides, J. Wenner, J. M. Martinis, and A. N. Cleland, Quantum ground state and single-phonon control of a mechanical resonator, Nature (London) 464, 697 (2010).
  4. Y. Chu, P. Kharel, W. H. Renninger, L. D. Burkhart, L. Frunzio, P. T. Rakich, and R. J. Schoelkopf, Quantum acoustics with superconducting qubits, Science 358, 199 (2017).
  5. K. J. Satzinger, Y. P. Zhong, H.-S. Chang, G. A. Peairs, A. Bienfait, M.-H. Chou, A. Y. Cleland, C. R. Conner, É. Dumur, J. Grebel, I. Gutierrez, B. H. November, R. G. Povey, S. J. Whiteley, D. D. Awschalom, D. I. Schuster, and A. N. Cleland, Quantum control of surface acoustic-wave phonons, Nature (London) 563, 661 (2018).
  6. P. Arrangoiz-Arriola, E. A. Wollack, Z. Wang, M. Pechal, W. Jiang, T. P. McKenna, J. D. Witmer, R. Van Laer, and A. H. Safavi-Naeini, Resolving the energy levels of a nanomechanical oscillator, Nature (London) 571, 537 (2019).
  7. R. Riedinger, S. Hong, R. A. Norte, J. A. Slater, J. Shang, A. G. Krause, V. Anant, M. Aspelmeyer, and S. Gröblacher, Non-classical correlations between single photons and phonons from a mechanical oscillator, Nature (London) 530, 313 (2016).
  8. M. Mirhosseini, A. Sipahigil, M. Kalaee, and O. Painter, Superconducting qubit to optical photon transduction, Nature (London) 588, 599 (2020).
  9. J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator, Phys. Rev. Lett. 113, 020503 (2014).
  10. P. K. Shandilya, D. P. Lake, M. J. Mitchell, D. D. Sukachev, and P. E. Barclay, Optomechanical interface between telecom photons and spin quantum memory, Nat. Phys. 17, 1420 (2021).
  11. S. J. Whiteley, G. Wolfowicz, C. P. Anderson, A. Bourassa, H. Ma, M. Ye, G. Koolstra, K. J. Satzinger, M. V. Holt, F. J. Heremans, A. N. Cleland, D. I. Schuster, G. Galli, and D. D. Awschalom, Spin–phonon interactions in silicon carbide addressed by Gaussian acoustics, Nat. Phys. 15, 490 (2019).
  12. M. V. Gustafsson, T. Aref, A. F. Kockum, M. K. Ekström, G. Johansson, and P. Delsing, Propagating phonons coupled to an artificial atom, Science 346, 207 (2014).
  13. É. Dumur, K. Satzinger, G. Peairs, M.-H. Chou, A. Bienfait, H.-S. Chang, C. Conner, J. Grebel, R. Povey, Y. Zhong et al., Quantum communication with itinerant surface acoustic wave phonons, npj Quantum Inf. 7, 173 (2021).
  14. E. B. Magnusson, B. H. Williams, R. Manenti, M.-S. Nam, A. Nersisyan, M. J. Peterer, A. Ardavan, and P. J. Leek, Surface acoustic wave devices on bulk ZnO crystals at low temperature, Appl. Phys. Lett. 106, 063509 (2015).
  15. A. Bienfait, Y. P. Zhong, H.-S. Chang, M.-H. Chou, C. R. Conner, É Dumur, J. Grebel, G. A. Peairs, R. G. Povey, K. J. Satzinger, and A. N. Cleland, Quantum erasure using entangled surface acoustic phonons, Phys. Rev. X 10, 021055 (2020).
  16. E. A. Wollack, A. Y. Cleland, R. G. Gruenke, Z. Wang, P. Arrangoiz-Arriola, and A. H. Safavi-Naeini, Quantum state preparation and tomography of entangled mechanical resonators, Nature (London) 604, 463 (2022).
  17. M.-H. Chou, H. Qiao, H. Yan, G. Andersson, C. R. Conner, J. Grebel, Y. J. Joshi, J. M. Miller, R. G. Povey, X. Wu, and A. N. Cleland, Deterministic multi-phonon entanglement between two mechanical resonators on separate substrates, Nat. Commun. 16, 1450 (2025).
  18. A. B. Bozkurt, O. Golami, Y. Yu, H. Tian, and M. Mirhosseini, A mechanical quantum memory for microwave photons, Nat. Phys. 21, 1469 (2025).
  19. A. Bienfait, K. J. Satzinger, Y. P. Zhong, H.-S. Chang, M.-H. Chou, C. R. Conner, É. Dumur, J. Grebel, G. A. Peairs, R. G. Povey, and A. N. Cleland, Phonon-mediated quantum state transfer and remote qubit entanglement, Science 364, 368 (2019).
  20. R. Manenti, A. F. Kockum, A. Patterson, T. Behrle, J. Rahamim, G. Tancredi, F. Nori, and P. J. Leek, Circuit quantum acoustodynamics with surface acoustic waves, Nat. Commun. 8, 975 (2017).
  21. H. Qiao, É. Dumur, G. Andersson, H. Yan, M.-H. Chou, J. Grebel, C. R. Conner, Y. J. Joshi, J. M. Miller, R. G. Povey, X. Wu, and A. N. Cleland, Splitting phonons: Building a platform for linear mechanical quantum computing, Science 380, 1030 (2023).
  22. H. Qiao, Z. Wang, G. Andersson, A. Anferov, C. R. Conner, Y. J. Joshi, S. Li, J. M. Miller, X. Wu, H. Yan, L. Jiang, and A. N. Cleland, Acoustic phonon phase gates with number-resolving phonon detection, Nat. Phys. 21, 1801 (2025).
  23. M. J. A. Schuetz, E. M. Kessler, G. Giedke, L. M. K. Vandersypen, M. D. Lukin, and J. I. Cirac, Universal quantum transducers based on surface acoustic waves, Phys. Rev. X 5, 031031 (2015).
  24. M.-H. Chou, É. Dumur, Y. Zhong, G. A. Peairs, A. Bienfait, H.-S. Chang, C. R. Conner, J. Grebel, R. G. Povey, K. J. Satzinger et al., Measurements of a quantum bulk acoustic resonator using a superconducting qubit, Appl. Phys. Lett. 117, 254001 (2020).
  25. C. J. Sarabalis, Y. D. Dahmani, A. Y. Cleland, and A. H. Safavi-Naeini, S-band delay lines in suspended lithium niobate, J. Appl. Phys. 127, 054501 (2020).
  26. A. Y. Cleland, M. Pechal, P.-J. C. Stas, C. J. Sarabalis, E. A. Wollack, and A. H. Safavi-Naeini, Mechanical purcell filters for microwave quantum machines, Appl. Phys. Lett. 115, 263504 (2019).
  27. A. Hugot, Q. A. Greffe, G. Julie, E. Eyraud, F. Balestro, and J. J. Viennot, Approaching optimal microwave–acoustic transduction on lithium niobate using superconducting quantum interference device arrays, Nat. Electron. 9, 152 (2026).
  28. P. Arrangoiz-Arriola and A. H. Safavi-Naeini, Engineering interactions between superconducting qubits and phononic nanostructures, Phys. Rev. A 94, 063864 (2016).
  29. S.-N. Liang, Z.-H. Qin, S.-M. Wu, H.-Y. Chen, S.-Y. Yu, and Y.-F. Chen, Deployable nanoelectromechanical bound states in the continuum in GHz Lamb wave phononic crystals on LiNbO3 thin films, Phys. Rev. Lett. 135, 206201 (2025).
  30. Q. Lin, Y. Yu, A. Guedeja-Marrón, C. Scolnic, H. Deng, S. Fang, Y. Zhou, B. Li, J. C. Idrobo, and M. Li, Experimental study of acoustic loss at microwave frequencies in thin-film lithium niobate, Appl. Phys. Lett. 128, 172202 (2026).
  31. S. A. Tadesse, H. Li, Q. Liu, and M. Li, Acousto-optic modulation of a photonic crystal nanocavity with Lamb waves in microwave K band, Appl. Phys. Lett. 107, 201113 (2015).
  32. L. Shao, M. Yu, S. Maity, N. Sinclair, L. Zheng, C. Chia, A. Shams-Ansari, C. Wang, M. Zhang, K. Lai, and M. Lončar, Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators, Optica 6, 1498 (2019).
  33. I. Marinković, M. Drimmer, B. Hensen, and S. Gröblacher, Hybrid integration of silicon photonic devices on lithium niobate for optomechanical wavelength conversion, Nano. Lett. 21, 529 (2021).
  34. A. Khurana, P. Jiang, and K. C. Balram, Piezo-optomechanical signal transduction using Lamb-wave supermodes in a suspended galliumarsenide photonic-integrated-circuit platform, Phys. Rev. Appl. 18, 054030 (2022).
  35. X. Tong, Y. Zou, Z. Wen, Z. Liu, T. Luo, J. Zhou, H. Liu, Y. Ren, Q. Xu, W. Liu, Y. Liu, Y. Cai, and C. Sun, 6 GHz Lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes, Microsyst. Nanoeng. 10, 130 (2024).
  36. A. Reinhardt, M. Bousquet, A. Joulie, E. Soulat, C. Maeder-Pachurka, P. Perreau, G. Enyedi, G. Castellan, J. Delprato, B. Reig, J.-L. Thomassin, H. Alavi, and P. Fischer, 5 GHz Lamb wave Wi-Fi channel filters, in 2022 IEEE International Ultrasonics Symposium (IUS) (IEEE, New York, 2022), pp. 1–4,
  37. K. J. Satzinger, Quantum control of surface acoustic wave phonons, Ph.D. thesis, University of California, Santa Barbara 2018, phD thesis, ProQuest ID: Satzinger_ucsb_0035D_13910, Merritt ID: ark:/13030/m5rj9hgm.
  38. A. Megrant, C. Neill, R. Barends, B. Chiaro, Y. Chen, L. Feigl, J. Kelly, E. Lucero, M. Mariantoni, P. J. O’Malley et al., Planar superconducting resonators with internal quality factors above one million, Appl. Phys. Lett. 100, 113510 (2012).
  39. R. Manenti, M. J. Peterer, A. Nersisyan, E. B. Magnusson, A. Patterson, and P. J. Leek, Surface acoustic wave resonators in the quantum regime, Phys. Rev. B 93, 041411(R) (2016).
  40. T. Luschmann, A. Jung, S. Geprägs, F. X. Haslbeck, A. Marx, S. Filipp, S. Gröblacher, R. Gross, and H. Huebl, Surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime, Mater. Quantum Technol. 3, 021001 (2023).
  41. R. G. Gruenke-Freudenstein, E. Szakiel, G. P. Multani, T. Makihara, A. G. Hayden, A. Khalatpour, E. A. Wollack, A. Akoto-Yeboah, S. Salmani-Rezaie, and A. H. Safavi-Naeini, Surface and bulk two-level-system losses in lithium niobate acoustic resonators, Phys. Rev. Appl. 23, 064055 (2025).
  42. K. J. Satzinger, C. R. Conner, A. Bienfait, H.-S. Chang, M.-H. Chou, A. Y. Cleland, É. Dumur, J. Grebel, G. A. Peairs, R. G. Povey, S. J. Whiteley, Y. P. Zhong, D. D. Awschalom, D. I. Schuster, and A. N. Cleland, Simple non-galvanic flip-chip integration method for hybrid quantum systems, Appl. Phys. Lett. 114, 173501 (2019).
  43. Y. Chen et al., Qubit architecture with high coherence and fast tunable coupling, Phys. Rev. Lett. 113, 220502 (2014).
  44. R. G. Gruenke-Freudenstein, E. Szakiel, G. P. Multani, T. Makihara, A. G. Hayden, A. Khalatpour, E. A. Wollack, A. Akoto-Yeboah, S. Salmani-Rezaie, and A. H. Safavi-Naeini, Surface and bulk two-level system losses in lithium niobate acoustic resonators, Phys. Rev. Appl. 23, 064055 (2025).
  45. I. E. Kuznetsova, B. D. Zaitsev, S. G. Joshi, and I. A. Borodina, Investigation of acoustic waves in thin plates of lithium niobate and lithium tantalate, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 322 (2001).

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