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    Anisotropic directional dependence of impact ionization and carrier transport in 4H-SiC: A full-band Monte Carlo study

    David Liu*, Mike Zhu, Masahiko Matsubara, and Enrico Bellotti

    • Department of Electrical and Computer Engineering, Boston University, Boston, Massachusetts 02215, USA

    • *Contact author: liudavid@bu.edu

    Phys. Rev. Applied 25, 034040 – Published 12 March, 2026

    DOI: https://doi.org/10.1103/wpkm-5wfv

    Abstract

    Mesa avalanche photodiodes (APDs) fabricated on 4H silicon carbide (4H-SiC) substrates have consistently produced spatially nonuniform optical responses, particularly at high gain. In this work, we propose that this nonuniformity can be explained by an interplay of several factors: the anisotropic band structure of the hexagonal material, the misalignment between the real-space and reciprocal-space axes induced by the miscut of 4H-SiC substrates, and the nonuniform electric fields of mesa APDs. Through full-band Monte Carlo (FBMC) simulations, field-dependent anisotropic impact ionization coefficients for a range of crystallographic directions between the principal axis (⟨0001⟩) and the basal plane (⟨112¯0⟩) are computed. In addition, the field-dependent carrier drift velocities are computed for the principal axis and the basal plane, primarily for model validation. Finally, the same FBMC model used to compute impact-ionization coefficients and drift velocities is used to perform a device simulation of a well-characterized APD for further validation of the model.

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