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Niobium air bridges as low-loss components for superconducting quantum hardware

N. Bruckmoser1,2,*, L. Koch1,2,†, I. Tsitsilin1,2, M. Grammer1,2, D. Bunch1,2, L. Richard1,2, J. Schirk1,2, F. Wallner1,2, J. Feigl1,2 et al.

C.M.F. Schneider1,2, S. Geprägs2, V.P. Bader2, M. Althammer1,2, L. Södergren1,2, and S. Filipp1,2,3

  • *Contact author: Niklas.Bruckmoser@wmi.badw.de
  • †Contact author: Leon.Koch@wmi.badw.de

Phys. Rev. Applied 25, 024007 – Published 3 February, 2026

DOI: https://doi.org/10.1103/smlq-r7x6

Abstract

Scaling up superconducting quantum processors necessitates the use of a high routing density for readout and control lines, relying on low-loss interconnects to maintain design flexibility and device performance. We propose and demonstrate a universal subtractive fabrication process for air bridges based on an aluminum hard mask and niobium as the superconducting film. Using this technology, we fabricate superconducting coplanar waveguide resonators incorporating several niobium air bridges in and across their center conductors. Through rigorous cleaning methods, we achieve mean internal quality factors in the single-photon limit exceeding Qint=8.2×106. Notably, the loss per air bridge remains below the detection threshold of the resonators. Due to the larger superconducting energy gap of niobium, compared with conventional aluminum air bridges, our approach enables stable performance at elevated temperatures and magnetic fields, which we experimentally confirm in temperatures up to 3.9 K and in a magnetic field of up to 1.60 T. Additionally, we utilize air bridges to realize low-loss vacuum-gap capacitors and demonstrate their successful integration in transmon qubits by achieving median qubit lifetimes of T1=51.6μs.

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synopsis

Building Better Bridges on Quantum Chips

Published 3 February, 2026

Fabricating some structures using niobium instead of aluminum could lead to more resilient superconducting quantum computers.

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References (58)

  1. S. Krinner, N. Lacroix, A. Remm, A. Di Paolo, E. Genois, C. Leroux, C. Hellings, S. Lazar, F. Swiadek, J. Herrmann, G. J. Norris, C. K. Andersen, M. Müller, A. Blais, C. Eichler, and A. Wallraff, Realizing repeated quantum error correction in a distance-three surface code, Nature 605, 669 (2022).
  2. S. Vallés-Sanclemente, S. L. M. Van Der Meer, M. Finkel, N. Muthusubramanian, M. Beekman, H. Ali, J. F. Marques, C. Zachariadis, H. M. Veen, T. Stavenga, N. Haider, and L. DiCarlo, Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors, Appl. Phys. Lett. 123, 034004 (2023).
  3. R. N. Simons, Coplanar Waveguide Circuits, Components, and Systems, edited by K. Chang, Wiley Series in Microwave and Optical Engineering (John Wiley & Sons, Inc., New York, USA, 2001).
  4. G. Ponchak, J. Papapolymerou, and M. Tentzeris, Excitation of coupled slotline mode in finite-ground CPW with unequal ground-plane widths, IEEE Trans. Microw. Theory Tech. 53, 713 (2005).
  5. F. Arute et al., Quantum supremacy using a programmable superconducting processor, Nature 574, 505 (2019).
  6. S. Cao et al., Generation of genuine entanglement up to 51 superconducting qubits, Nature 619, 738 (2023).
  7. M. Schicke and K. Schuster, Integrated niobium thin film air bridges as variable capacitors for superconducting GHz electronic circuits, IEEE Trans. Appl. Supercond. 13, 135 (2003).
  8. Z. Chen, A. Megrant, J. Kelly, R. Barends, J. Bochmann, Y. Chen, B. Chiaro, A. Dunsworth, E. Jeffrey, J. Y. Mutus, P. J. J. O’Malley, C. Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T. C. White, A. N. Cleland, and J. M. Martinis, Fabrication and characterization of aluminum airbridges for superconducting microwave circuits, Appl. Phys. Lett. 104, 052602 (2014).
  9. A. Dunsworth et al., A method for building low loss multi-layer wiring for superconducting microwave devices, Appl. Phys. Lett. 112, 063502 (2018).
  10. Y. Sun, J. Ding, X. Xia, X. Wang, J. Xu, S. Song, D. Lan, J. Zhao, and Y. Yu, Fabrication of airbridges with gradient exposure, Appl. Phys. Lett. 121, 074001 (2022).
  11. K. Bu, S. Huai, Z. Zhang, D. Li, Y. Li, J. Hu, X. Yang, M. Dai, T. Cai, Y.-C. Zheng, and S. Zhang, Tantalum airbridges for scalable superconducting quantum processors, npj Quantum Inf. 11, 17 (2025).
  12. L. D. Alegria, A. Abelson, E. Kim, S. Im, P. M. Voyles, V. Lordi, J. L. DuBois, and Y. J. Rosen, Growth and structure of alpha-Ta films for quantum circuit integration, J. Appl. Phys. 137, 044402 (2025).
  13. E. Girgis, J. Liu, and M. L. Benkhedar, Fabrication of metallic air bridges using multiple-dose electron beam lithography, Appl. Phys. Lett. 88, 202103 (2006).
  14. A. Khalid, C. Li, J. Grant, S. Saha, S. Ferguson, and D. R. Cumming, Simple e-beam air-bridge technology for mm-wave applications, Microelectron. Eng. 98, 262 (2012).
  15. Y. Jin, M. Moreno, P. M. T. Vianez, W. K. Tan, J. P. Griffiths, I. Farrer, D. A. Ritchie, and C. J. B. Ford, Microscopic metallic air-bridge arrays for connecting quantum devices, Appl. Phys. Lett. 118, 162108 (2021).
  16. N. Janzen, M. Kononenko, S. Ren, and A. Lupascu, Aluminum air bridges for superconducting quantum devices realized using a single-step electron-beam lithography process, Appl. Phys. Lett. 121, 094001 (2022).
  17. T. Stavenga, S. A. Khan, Y. Liu, P. Krogstrup, and L. DiCarlo, Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors, Appl. Phys. Lett. 123, 024004 (2023).
  18. H.-R. Tao, C. Zhang, L. Du, X.-X. Yang, L.-L. Guo, Y. Chen, H.-F. Zhang, Z.-L. Jia, W.-C. Kong, P. Duan, and G.-P. Guo, Fabrication and characterization of low loss niobium airbridges for superconducting quantum circuits, Appl. Phys. Lett. 125, 034001 (2024).
  19. Y. Wu et al., Strong quantum computational advantage using a superconducting quantum processor, Phys. Rev. Lett. 127, 180501 (2021).
  20. N. D. Korshakov, D. O. Moskalev, A. A. Soloveva, D. A. Moskaleva, E. S. Lotkov, A. R. Ibragimov, M. V. Androschuk, I. A. Ryzhikov, Y. V. Panfilov, and I. A. Rodionov, Aluminum Josephson junction microstructure and electrical properties modified by thermal annealing, Sci. Rep. 14, 26066 (2024).
  21. J. B. Hertzberg, E. J. Zhang, S. Rosenblatt, E. Magesan, J. A. Smolin, J.-B. Yau, V. P. Adiga, M. Sandberg, M. Brink, J. M. Chow, and J. S. Orcutt, Laser-annealing Josephson junctions for yielding scaled-up superconducting quantum processors, npj Quantum Inf. 7, 129 (2021).
  22. E. J. Zhang et al., High-performance superconducting quantum processors via laser annealing of transmon qubits, Sci. Adv. 8, eabi6690 (2022).
  23. D. K. Finnemore, T. F. Stromberg, and C. A. Swenson, Superconducting properties of high-purity niobium, Phys. Rev. 149, 231 (1966).
  24. S. Krinner, S. Storz, P. Kurpiers, P. Magnard, J. Heinsoo, R. Keller, J. Lütolf, C. Eichler, and A. Wallraff, Engineering cryogenic setups for 100-qubit scale superconducting circuit systems, EPJ Quantum Technol. 6, 2 (2019).
  25. A. Anferov, A. Suleymanzade, A. Oriani, J. Simon, and D. I. Schuster, Millimeter-wave four-wave mixing via kinetic inductance for quantum devices, Phys. Rev. Appl. 13, 024056 (2020).
  26. A. Anferov, K.-H. Lee, F. Zhao, J. Simon, and D. I. Schuster, Improved coherence in optically defined niobium trilayer-junction qubits, Phys. Rev. Appl. 21, 024047 (2024).
  27. A. Chandrasekaran, R. W. Van De Kruijs, J. M. Sturm, and F. Bijkerk, Nb texture evolution and interdiffusion in Nb/Si-layered systems, ACS Appl. Mater. Interfaces 13, 31260 (2021).
  28. A. A. Murthy, P. Masih Das, S. M. Ribet, C. Kopas, J. Lee, M. J. Reagor, L. Zhou, M. J. Kramer, M. C. Hersam, M. Checchin, A. Grassellino, R. dos Reis, V. P. Dravid, and A. Romanenko, Developing a chemical and structural understanding of the surface oxide in a niobium superconducting qubit, ACS Nano 16, 17257 (2022).
  29. C. M. Quintana et al., Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits, Appl. Phys. Lett. 105, 062601 (2014).
  30. Y. Okuyama, T. Hashimoto, and T. Koguchi, High dose ion implantation into photoresist, J. Electrochem. Soc. 125, 1293 (1978).
  31. J. Tian and M. Bartek, in 2008 58th Electronic Components and Technology Conference (IEEE, Piscataway, NJ, USA, 2008), pp. 1787–1792.
  32. D. S. Wisbey, J. Gao, M. R. Vissers, F. C. S. da Silva, J. S. Kline, L. Vale, and D. P. Pappas, Effect of metal/substrate interfaces on radio-frequency loss in superconducting coplanar waveguides, J. Appl. Phys. 108, 093918 (2010).
  33. T. Imamura, S. Ohara, and S. Hasuo, Bias-sputtered Nb for reliable wirings in Josephson circuits, IEEE Trans. Magn. 27, 3176 (1991).
  34. A. N. Bolgar, D. A. Kalacheva, V. B. Lubsanov, A. Y. Dmitriev, E. S. Alekseeva, E. V. Korostylev, and O. V. Astafiev, Highly stable aluminum air-bridges with stiffeners, J. Appl. Phys. 137, 154401 (2025).
  35. M. V. P. Altoé, A. Banerjee, C. Berk, A. Hajr, A. Schwartzberg, C. Song, M. Alghadeer, S. Aloni, M. J. Elowson, J. M. Kreikebaum, E. K. Wong, S. M. Griffin, S. Rao, A. Weber-Bargioni, A. M. Minor, D. I. Santiago, S. Cabrini, I. Siddiqi, and D. F. Ogletree, Localization and mitigation of loss in niobium superconducting circuits, PRX Quantum 3, 020312 (2022).
  36. J. Rairden and C. Neugebauer, Critical temperature of niobium and tantalum films, Proc. IEEE 52, 1234 (1964).
  37. A. Bienfait, J. J. Pla, Y. Kubo, M. Stern, X. Zhou, C. C. Lo, C. D. Weis, T. Schenkel, M. L. W. Thewalt, D. Vion, D. Esteve, B. Julsgaard, K. Mølmer, J. J. L. Morton, and P. Bertet, Reaching the quantum limit of sensitivity in electron spin resonance, Nat. Nanotechnol. 11, 253 (2016).
  38. Z. Wang, L. Balembois, M. Rančić, E. Billaud, M. Le Dantec, A. Ferrier, P. Goldner, S. Bertaina, T. Chanelière, D. Esteve, D. Vion, P. Bertet, and E. Flurin, Single-electron spin resonance detection by microwave photon counting, Nature 619, 276 (2023).
  39. J. Krause, C. Dickel, E. Vaal, M. Vielmetter, J. Feng, R. Bounds, G. Catelani, J. M. Fink, and Y. Ando, Magnetic field resilience of three-dimensional transmons with thin-film Al/AlOx/Al Josephson junctions approaching 1 T, Phys. Rev. Appl. 17, 034032 (2022).
  40. L. Janssen, G. Butseraen, J. Krause, A. Coissard, L. Planat, N. Roch, G. Catelani, Y. Ando, and C. Dickel, Magnetic field dependence of a Josephson traveling-wave parametric amplifier and integration into a high-field setup, Phys. Rev. Appl. 22, 054018 (2024).
  41. C. R. H. McRae, H. Wang, J. Gao, M. R. Vissers, T. Brecht, A. Dunsworth, D. P. Pappas, and J. Mutus, Materials loss measurements using superconducting microwave resonators, Rev. Sci. Instrum. 91, 091101 (2020).
  42. S. Probst, F. B. Song, P. A. Bushev, A. V. Ustinov, and M. Weides, Efficient and robust analysis of complex scattering data under noise in microwave resonators, Rev. Sci. Instrum. 86, 024706 (2015).
  43. W. A. Phillips, Two-level states in glasses, Rep. Prog. Phys. 50, 1657 (1987).
  44. C. Müller, J. H. Cole, and J. Lisenfeld, Towards understanding two-level-systems in amorphous solids: Insights from quantum circuits, Rep. Prog. Phys. 82, 124501 (2019).
  45. K. Cicak, D. Li, J. A. Strong, M. S. Allman, F. Altomare, A. J. Sirois, J. D. Whittaker, J. D. Teufel, and R. W. Simmonds, Low-loss superconducting resonant circuits using vacuum-gap-based microwave components, Appl. Phys. Lett. 96, 093502 (2010).
  46. X. Li et al., Vacuum-gap transmon qubits realized using flip-chip technology, Appl. Phys. Lett. 119, 184003 (2021).
  47. T. M. Hazard, W. Woods, D. Rosenberg, R. Das, C. F. Hirjibehedin, D. K. Kim, J. M. Knecht, J. Mallek, A. Melville, B. M. Niedzielski, K. Serniak, K. M. Sliwa, D. R. W. Yost, J. L. Yoder, W. D. Oliver, and M. E. Schwartz, Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits, Appl. Phys. Lett. 123, 154004 (2023).
  48. M. Zemlicka, E. Redchenko, M. Peruzzo, F. Hassani, A. Trioni, S. Barzanjeh, and J. Fink, Compact vacuum-gap transmon qubits: Selective and sensitive probes for superconductor surface losses, Phys. Rev. Appl. 20, 044054 (2023).
  49. M. V. Costache, G. Bridoux, I. Neumann, and S. O. Valenzuela, Lateral metallic devices made by a multiangle shadow evaporation technique, J. Vac. Sci. Technol. B, Nanotechnol. Microelectron.: Mater., Process., Meas., Phenom. 30, 04E105 (2012).
  50. J. M. Kreikebaum, K. P. O’Brien, A. Morvan, and I. Siddiqi, Improving wafer-scale Josephson junction resistance variation in superconducting quantum coherent circuits, Supercond. Sci. Technol. 33, 06LT02 (2020).
  51. A. Dunsworth et al., Characterization and reduction of capacitive loss induced by sub-micron Josephson junction fabrication in superconducting qubits, Appl. Phys. Lett. 111, 022601 (2017).
  52. M. Bal et al., Systematic improvements in transmon qubit coherence enabled by niobium surface encapsulation, npj Quantum Inf. 10, 43 (2024).
  53. M. Tuokkola, Y. Sunada, H. Kivijärvi, J. Albanese, L. Grönberg, J.-P. Kaikkonen, V. Vesterinen, J. Govenius, and M. Möttönen, Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit, Nat. Commun. 16, 5421 (2025).
  54. J. Verjauw, A. Potočnik, M. Mongillo, R. Acharya, F. Mohiyaddin, G. Simion, A. Pacco, T. Ivanov, D. Wan, A. Vanleenhove, L. Souriau, J. Jussot, A. Thiam, J. Swerts, X. Piao, S. Couet, M. Heyns, B. Govoreanu, and I. Radu, Investigation of microwave loss induced by oxide regrowth in high-Q niobium resonators, Phys. Rev. Appl. 16, 014018 (2021).
  55. C. W. Warren, J. Fernández-Pendás, S. Ahmed, T. Abad, A. Bengtsson, J. Biznárová, K. Debnath, X. Gu, C. Križan, A. Osman, A. Fadavi Roudsari, P. Delsing, G. Johansson, A. Frisk Kockum, G. Tancredi, and J. Bylander, Extensive characterization and implementation of a family of three-qubit gates at the coherence limit, npj Quantum Inf. 9, 44 (2023).
  56. N. Bruckmoser, L. Koch, I. Tsitsilin, M. Grammer, S. Lasse, and S. Filipp, Supporting data for “Niobium air bridges as low-loss components for superconducting quantum hardware”, Zenodo, 2025, https://doi.org/10.5281/zenodo.17920650.
  57. T. Imamura and S. Hasuo, Effects of intrinsic stress on submicrometer Nb/AlO/sub x//Nb Josephson junctions, IEEE Trans. Magn. 25, 1119 (1989).
  58. F. Motazedian, Z. Wu, J. Zhang, B. Samsam Shariat, D. Jiang, M. Martyniuk, Y. Liu, and H. Yang, Determining intrinsic stress and strain state of fibre-textured thin films by X-ray diffraction measurements using combined asymmetrical and Bragg-Brentano configurations, Mater. Des. 181, 108063 (2019).

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