- Open Access
Tunable terahertz source on a chip with decade-long stability using layered-superconductor elliptical microcavities
Phys. Rev. Applied 24, 054012 – Published 5 November, 2025
DOI: https://doi.org/10.1103/pwlx-4sjf
Abstract
Chip-scale, electrically tunable, continuous-wave, coherent terahertz (THz) radiation sources are critical for emerging applications in sensing, imaging, spectroscopy, communications, space, and quantum technologies. Here, we demonstrate a robust source-on-a-chip THz emitter based on a layered high-temperature superconductor, engineered with an elliptical microcavity and capable of sustained coherent emission over an unprecedented operational lifetime exceeding 11 years. This compact THz source operates up to 60 K (with ≈ 90 K), delivering stable radiation in the 0.7–0.8 THz range, with on-chip electrical tunability from 100 GHz to 1 THz. Coherence arises from the phase-locked oscillation of intrinsic Josephson junction arrays, resonantly coupled to transverse electromagnetic modes within the cavity, analogous to a laser cavity, yielding collective macroscopic oscillations. THz emission remains detectable across an approximately 0.5-m free-space open-air link at room temperature. We analyse the cavity-mode structure and extract THz photon generation rates up to approximately 503 photons in cryogenic conditions and 50–260 photons over the air. These results demonstrate, for the first time, sustained and electrically tunable coherent THz emission from superconductors over multiyear timescales, defining another class of robust, chip-integrated THz lasers with applications in scalable THz and quantum technologies.
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References (50)
- S. Shi, S. Yuan, J. Zhou, and P. Jiang, Terahertz technology and its applications in head and neck diseases, iScience 26 (7), 107060 (2023), (in eng).
- X. Chen, H. Lindley-Hatcher, R. I. Stantchev, J. Wang, K. Li, A. Hernandez Serrano, Z. D. Taylor, E. Castro-Camus, and E. Pickwell-MacPherson, Terahertz (THz) biophotonics technology: Instrumentation, techniques, and biomedical applications, Chem. Phys. Rev. 3 (1), 011311 (2022).
- R. Wieland, O. Kizilaslan, N. Kinev, E. Dorsch, S. Guénon, Z. Song, Z. Wei, H. Wang, P. Wu, D. Koelle, V. P. Koshelets, and R. Kleiner, Terahertz emission from mutually synchronized standalone intrinsic-Josephson-junction stacks, Phys. Rev. Appl. 22 (4), 044022 (2024).
- W. Nsengiyumva, S. Zhong, L. Zheng, W. Liang, B. Wang, Y. Huang, X. Chen, and Y. Shen, Sensing and nondestructive testing applications of terahertz spectroscopy and imaging systems: State-of-the-art and state-of-the-practice, IEEE Trans. Instrum. Meas. 72, 1 (2023).
- Z. Chen, C. Han, Y. Wu, L. Li, C. Huang, Z. Zhang, G. Wang, and W. Tong, Terahertz wireless communications for 2030 and beyond: A cutting-edge frontier, IEEE Commun. Mag. 59 (11), 66 (2021).
- I. F. Akyildiz, C. Han, Z. Hu, S. Nie, and J. M. Jornet, Terahertz band communication: An old problem revisited and research directions for the next decade, IEEE Trans. Commun. 70 (6), 4250 (2022).
- C. Ottaviani, M. J. Woolley, M. Erementchouk, J. F. Federici, P. Mazumder, S. Pirandola, and C. Weedbrook, Terahertz quantum cryptography, IEEE J. Sel. Areas Commun. 38 (3), 483 (2020).
- M. Zhang, S. Pirandola, and K. Delfanazari, Millimetre-waves to terahertz SISO and MIMO continuous variable quantum key distribution, IEEE Trans. Quantum Eng. 4, 1 (2023).
- N. K. Kundu, M. R. McKay, and R. K. Mallik, Wireless quantum key distribution at terahertz frequencies: Opportunities and challenges, IET Quantum Commun. 5, 450 (2024).
- M. Kutas, et al., Terahertz quantum sensing, Sci. Adv. 6, eaaz8065 (2020).
- T. Kashiwagi, M. Tsujimoto, T. Yamamoto, H. Minami, K. Yamaki, K. Delfanazari, K. Deguchi, N. Orita, T. Koike, R. Nakayama, T. Kitamura, M. Sawamura, S. Hagino, K. Ishida, K. Ivanovic, H. Asai, M. Tachiki, R. A. Klemm, and K. Kadowaki, High temperature superconductor terahertz emitters: fundamental physics and its applications, Jpn. J. Appl. Phys. 51, 010113 (2012).
- T. Kashiwagi, et al., Efficient fabrication of intrinsic-Josephson-junction terahertz oscillators with greatly reduced self-heating effects, Phys. Rev. Appl. 4 (5), 054018 (2015).
- K. Delfanazari, H. Asai, M. Tsujimoto, T. Kashiwagi, T. Kitamura, T. Yamamoto, M. Sawamura, K. Ishida, C. Watanabe, S. Sekimoto, H. Minami, M. Tachiki, R. A. Klemm, T. Hattori, and K. Kadowaki, Tunable terahertz emission from the intrinsic Josephson junctions in acute isosceles triangular mesas, Opt. Express 21 (2), 2171 (2013).
- S. Kalhor, S. J. Kindness, R. Wallis, H. E. Beere, M. Ghanaatshoar, R. Degl'Innocenti, M. J. Kelly, S. Hofmann, H. J. Joyce, D. A. Ritchie, and K. Delfanazari, Active terahertz modulator and slow light metamaterial devices with hybrid graphene-superconductor photonic integrated circuits, Nanomaterials 11 (11), 2999 (2021).
- S. Kalhor, S. Savel'ev, and K. Delfanazari, Engineering ultrastrong coupling between Josephson plasmon polaritons and subwavelength microcavity arrays in silicon/van der Waals layered superconductor heterostructure for terahertz hybrid circuit cavity quantum electrodynamics, Phys. Rev. B 106 (24), 245140 (2022).
- K. Delfanazari, H. Asai, M. Tsujimoto, T. Kashiwagi, T. Kitamura, K. Ishida, C. Watanabe, S. Sekimoto, T. Yamamoto, H. Minami, M. Tachiki, R. A. Klemm, T. Hattori, and K. Kadowaki, Terahertz oscillating devices based upon the intrinsic Josephson junctions in a high temperature superconductor, J. Infrared, Millimeter, Terahertz Waves 35 (1), 131 (2014).
- K. Delfanazari, On-chip coherent terahertz emitters with gigahertz modulation, Nat. Photonics 18 (3), 214 (2024).
- M. Miyamoto, R. Kobayashi, G. Kuwano, M. Tsujimoto, and I. Kakeya, Wide-band frequency modulation of a terahertz intrinsic Josephson junction emitter of a cuprate superconductor, Nat. Photonics 18 (3), 267 (2024).
- L. Ozyuzer, A. E. Koshelev, C. Kurter, N. Gopalsami, Q. Li, M. Tachiki, K. Kadowaki, T. Yamamoto, H. Minami, H. Yamaguchi, T. Tachiki, K. E. Gray, W. K. Kwok, and U. Welp, Emission of coherent THz radiation from superconductors, Science 318 (5854), 1291 (2007), (in eng).
- E. A. Borodianskyi and V. M. Krasnov, Josephson emission with frequency span 1–11 THz from small mesa structures, Nat. Commun. 8 (1), 1742 (2017).
- K. Delfanazari, R. A. Klemm, H. J. Joyce, D. A. Ritchie, and K. Kadowaki, Integrated, portable, tunable, and coherent terahertz sources and sensitive detectors based on layered superconductors, Proc. IEEE 108 (5), 721 (2020).
- U. Welp, K. Kadowaki, and R. Kleiner, Superconducting emitters of THz radiation, Nat. Photonics 7, 702 (2013).
- T. Mochiku and K. Kadowaki, Growth and properties of single crystals, Phys. C 235–240, 523 (1994).
- K. Delfanazari, H. Asai, M. Tsujimoto, T. Kashiwagi, T. Kitamura, T. Yamamoto, W. Wilson, R. A. Klemm, T. Hattori, and K. Kadowaki, Effect of bias electrode position on terahertz radiation from pentagonal mesas of superconducting , IEEE Trans. Terahertz Sci. Technol. 5 (3), 505 (2015).
- R. Kleiner, F. Steinmeyer, G. Kunkel, and P. Müller, Intrinsic Josephson effects in single crystals, Phys. Rev. Lett. 68 (15), 2394 (1992).
- C. Watanabe, H. Minami, T. Yamamoto, T. Kashiwagi, R. A. Klemm, and K. Kadowaki, Spectral investigation of hot spot and cavity resonance effects on the terahertz radiation from high-Tc superconducting mesas, J. Phys.: Condens. Matter 26 (17), 172201 (2014).
- H. Minami, C. Watanabe, T. Kashiwagi, T. Yamamoto, K. Kadowaki, and R. A. Klemm, 0.43 THz emission from high-Tc superconducting emitters optimized at 77 K, J. Phys.: Condens. Matter 28 (2), 025701 (2016).
- S. Sekimoto, C. Watanabe, H. Minami, T. Yamamoto, T. Kashiwagi, R. A. Klemm, and K. Kadowaki, Continuous 30 µW terahertz source by a high-Tc superconductor mesa structure, Appl. Phys. Lett. 103 (18), 182601 (2013).
- N. Miyakawa, P. Guptasarma, J. F. Zasadzinski, D. G. Hinks, and K. E. Gray, Strong dependence of the superconducting gap on oxygen doping from tunneling measurements on −δ, Phys. Rev. Lett. 80 (1), 157 (1998).
- C. Kurter, K. E. Gray, J. F. Zasadzinski, L. Ozyuzer, A. E. Koshelev, Q. Li, T. Yamamoto, K. Kadowaki, W. K. Kwok, M. Tachiki, and U. Welp, Thermal management in large Bi2212 mesas used for terahertz sources, IEEE Trans. Appl. Supercond. 19 (3), 428 (2009).
- M. Tsujimoto, T. Yamamoto, K. Delfanazari, R. Nakayama, T. Kitamura, M. Sawamura, T. Kashiwagi, H. Minami, M. Tachiki, K. Kadowaki, and R. A. Klemm, Broadly tunable subterahertz emission from internal branches of the current-voltage characteristics of superconducting single crystals, Phys. Rev. Lett. 108 (10), 107006 (2012).
- J. R. Rain, P. Y. Cai, A. Baekey, M. A. Reinhard, R. I. Vasquez, A. C. Silverman, C. L. Cain, and R. A. Klemm, Wave functions for high-symmetry, thin microstrip antennas, and two-dimensional quantum boxes, Phys. Rev. A 104 (6), 062205 (2021).
- R. A. Klemm and K. Kadowaki, Output from a Josephson stimulated terahertz amplified radiation emitter, J. Phys.: Condens. Matter 22 (37), 375701 (2010).
- M. Tachiki, M. Iizuka, K. Minami, S. Tejima, and H. Nakamura, Emission of continuous coherent terahertz waves with tunable frequency by intrinsic Josephson junctions, Phys. Rev. B 71, 134515 (2005).
- L. N. Bulaevskii and A. E. Koshelev, Radiation due to Josephson oscillations in layered superconductors, Phys. Rev. Lett. 99, 057002 (2007).
- A. Elarabi, Y. Yoshioka, M. Tsujimoto, and I. Kakeya, Circularly polarized terahertz radiation monolithically generated by cylindrical mesas of intrinsic Josephson junctions, Appl. Phys. Lett. 113, 132602 (2018).
- T. M. Benseman, K. E. Gray, A. E. Koshelev, W.-K. Kwok, U. Welp, H. Minami, K. Kadowaki, and T. Yamamoto, Powerful terahertz emission from mesa arrays, Appl. Phys. Lett. 103, 022602 (2013).
- K. J. Kihlstrom, K. C. Reddy, S. Elghazoly, T. E. Sharma, A. E. Koshelev, U. Welp, Y. Hao, R. Divan, M. Tsujimoto, K. Kadowaki, W.-K. Kwok, and T. M. Benseman, Powerful terahertz emission from a mesa operating above 77 K, Phys. Rev. Appl. 19, 034055 (2023).
- Y. Saito, I. Kakeya, and Y. Takano, Polarization analysis of terahertz emission from -2212 cross whisker intrinsic Josephson junction devices and their refractive index, Appl. Phys. Lett. 121, 212601 (2022).
- M. Tsujimoto, H. Minami, K. Delfanazari, M. Sawamura, R. Nakayama, T. Kitamura, T. Yamamoto, T. Kashiwagi, T. Hattori, and K. Kadowaki, Terahertz imaging system using high-Tc superconducting oscillation devices, J. Appl. Phys. 111, 123111 (2012).
- M. Tsujimoto, K. Delfanazari, T. Kashiwagi, T. Hattori, K. Kadowaki, “Terahertz imaging system with on-chip superconducting Josephson plasma emitters for nondestructive testing”, Preprint at https://arxiv.org/abs/2305.14643, 2023.
- H. Sun, S. Chen, Y.-L. Wang, G. Sun, J. Chen, T. Hatano, V. P. Koshelets, D. Koelle, R. Kleiner, H. Wang, and P. Wu, Compact high-Tc superconducting terahertz emitter with tunable frequency from 0.15 to 1 THz, Appl. Sci. 13, 3469 (2023).
- M. Li, J. Yuan, N. Kinev, J. Li, B. Gross, S. Guénon, A. Ishii, K. Hirata, T. Hatano, D. Koelle, R. Kleiner, V. P. Koshelets, H. Wang, and P. Wu, Linewidth dependence of coherent terahertz emission from intrinsic Josephson junction stacks in the hot-spot regime, Phys. Rev. B 86, 060505 (2012).
- H. Minami, C. Watanabe, K. Sato, S. Sekimoto, T. Yamamoto, T. Kashiwagi, R. A. Klemm, and K. Kadowaki, Local SiC photoluminescence evidence of hot spot formation and sub-THz coherent emission from a rectangular mesa, Phys. Rev. B 89, 054503 (2014).
- E. Sobakinskaya, V. Khodos, E. Yakimov, A. Osipov, S. Belyaev, A. Semenov, and V. Ryazanov, High resolution terahertz spectroscopy with a noise radiation source based on high-Tc superconductors, J. Phys. D: Appl. Phys. 50, 035305 (2017).
- R. Kleiner and H. Wang, Terahertz emission from intrinsic Josephson junction stacks, J. Appl. Phys. 126, 171101 (2019).
- K. Delfanazari, H. Asai, M. Tsujimoto, T. Kashiwagi, T. Kitamura, T. Yamamoto, M. Sawamura, K. Ishida, M. Tachiki, R. A. Klemm, T. Hattori, and K. Kadowaki, Study of coherent and continuous terahertz wave emission in equilateral triangular mesas of superconducting intrinsic Josephson junctions, Phys. C 491, 16 (2013).
- D. R. Kazanov and A. M. Monakhov, Optical modes in elliptical microcavities for single-photon sources, JETP Lett. 117 (6), 422 (2023).
- P. Series, “Attenuation by atmospheric gases and related effects,” Recommendation ITU-R 25, pp. 676–12, 2019.
- K. Delfanazari, Chip-scale electrically driven superconducting coherent photon sources for quantum information processing, Nat. Photonics (2025).