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  • Letter

Highly Sensitive Temperature Sensing Using the Silicon Vacancy in Silicon Carbide by Simultaneously Resonated Optically Detected Magnetic Resonance

Yuichi Yamazaki1,*, Yuta Masuyama1, Kazutoshi Kojima2, and Takeshi Ohshima1

  • 1National Institutes for Quantum Science and Technology, Quantum Materials and Applications Research Center, Takasaki, Gunma 370-1292, Japan
  • 2National Institute of Advanced Industrial Science and Technology, Advanced Power Electronics Research Center, Tsukuba, Ibaraki 305-8568, Japan

  • *yamazaki.yuichi@qst.go.jp

Phys. Rev. Applied 20, L031001 – Published 5 September, 2023

DOI: https://doi.org/10.1103/PhysRevApplied.20.L031001

Abstract

Quantum sensors using silicon vacancy (VSi) in silicon carbide (SiC) are expected to be capable of directly measuring inside SiC devices. It is a serious problem that we have to employ the excited state (ES) of VSi with very low temperature sensitivity for quantum sensing due to there being no temperature sensitivity for the ground state (GS). Here, we propose a temperature measurement protocol, simultaneously resonated optically detected magnetic resonance (SRODMR), based on the modulation of the GS ODMR response resulting from simultaneous resonance of both GS and ES. This protocol diverts part of the GS ODMR contrast to temperature measurement, and in principle, temperature can be measured at an equivalent signal intensity to that of GS ODMR. SRODMR improves signal intensity by 1 order of magnitude compared with the conventional method (ES ODMR), leading to temperature measurements with a smaller error.

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