Reuse & Permissions

It is not necessary to obtain permission to reuse this article or its components as it is available under the terms of the Creative Commons Attribution 4.0 International license. This license permits unrestricted use, distribution, and reproduction in any medium, provided attribution to the author(s) and the published article's title, journal citation, and DOI are maintained. Please note that some figures may have been included with permission from other third parties. It is your responsibility to obtain the proper permission from the rights holder directly for these figures.

Export citation

Export citation

Choose format for download:

Download Citation
  • Open Access

On-chip microwave interferometry using phononic integrated circuits

Mahmut Bicer, A. Fahad Malik, and Krishna C. Balram*

  • Quantum Engineering Technology Labs and School of Electrical, Electronic and Mechanical Engineering, University of Bristol, Woodland Road, Bristol BS8 1UB, United Kingdom

  • *Contact author: krishna.coimbatorebalram@bristol.ac.uk

Phys. Rev. Applied 25, 064035 – Published 8 June, 2026

DOI: https://doi.org/10.1103/96ns-kvtd

Abstract

Piezoelectric phononic integrated circuits (PnICs), chip-scale platforms in which GHz frequency acoustic fields are routed in µm-scale waveguide geometries, have steadily advanced in performance and complexity, providing new degrees of freedom for manipulating microwave signals. Here, we consider the use of PnICs for implementing on-chip microwave interferometers (f=3.4GHz) using a gallium nitride (GaN) on silicon carbide (SiC) PnIC platform. We demonstrate controlled mode amplitude splitting, differential control (local phase shift), and mode recombination in an unbalanced (ΔL=1.6mm) phononic Mach-Zehnder interferometer (MZI), achieving a maximum fringe visibility >0.985. The high visibility does not imply high sensitivity due to the presence of parasitic acoustic modes in the MZI. We quantify the effect of these parasitic guided modes in the interferometer, and discuss potential design improvements for achieving quasi-single-mode operation in PnICs, with a view toward enabling applications in microwave and acoustic signal processing and sensing.

View figure in article

Physics Subject Headings (PhySH)

Article Text

References (44)

  1. K. C Balram, Piezoelectric phononic integrated circuits, Appl. Phys. Lett. 125, 200505 (2024).
  2. L. Chrostowski and M. Hochberg, Silicon Photonics Design: from Devices to Systems (Cambridge University Press, Cambridge, UK, 2015).
  3. A. Oliner, Waveguides for acoustic surface waves: A review, Proc. IEEE 64, 615 (1976).
  4. V. L. Tassev, Heteroepitaxy, an amazing contribution of crystal growth to the world of optics and electronics, Crystals 7, 178 (2017).
  5. T. Takai, H. Iwamoto, Y. Takamine, T. Fuyutsume, T. Nakao, M. Hiramoto, T. Toi, and M. Koshino, in 2017 IEEE International Ultrasonics Symposium (IUS) (IEEE, 2017), p. 1.
  6. V. Laude, Phononic Crystals: Artificial Crystals for Sonic, Acoustic, and Elastic Waves (Walter de Gruyter GmbH & Co KG, Berlin, Germany, 2015), Vol. 26.
  7. A. H. Safavi-Naeini, D. Van Thourhout, R. Baets, and R. Van Laer, Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics, Optica 6, 213 (2019).
  8. M. Bicer and K. C. Balram, Low-loss GHz frequency phononic integrated circuits in gallium nitride for compact radio frequency acoustic wave devices, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 71, 172 (2024).
  9. S. Datta, Surface Acoustic Wave Devices (Prentice-Hall, Hoboken, New Jersey, U.S., 1986). https://books.google.co.uk/books?id=ng9TAAAAMAAJ.
  10. M. Bicer, S. Valle, J. Brown, M. Kuball, and K. C Balram, Gallium nitride phononic integrated circuits platform for GHz frequency acoustic wave devices, Appl. Phys. Lett. 120, 243502 (2022).
  11. P. R. Saulson, Fundamentals of Interferometric Gravitational Wave Detectors (World Scientific, Singapore, 1994).
  12. P. R. Saulson, How an interferometer extracts and amplifies power from a gravitational wave, Class. Quantum Gravity 14, 2435 (1997).
  13. B. P. Abbott, R. Abbott, T. D. Abbott, M. R. Abernathy, F. Acernese, K. Ackley, C. Adams, T. Adams, P. Addesso, R. X. Adhikari, et al., Observation of gravitational waves from a binary black hole merger, Phys. Rev. Lett. 116, 061102 (2016).
  14. E. D. Black and R. N. Gutenkunst, An introduction to signal extraction in interferometric gravitational wave detectors, Am. J. Phys. 71, 365 (2003).
  15. Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, et al., Deep learning with coherent nanophotonic circuits, Nat. Photonics 11, 441 (2017).
  16. P. L. McMahon, The physics of optical computing, Nat. Rev. Phys. 5, 717 (2023).
  17. PsiQuantum team, A manufacturable platform for photonic quantum computing, Nature 641, 876 (2025).
  18. G. Moulton, in Hewlett-Packard RF and Microwave Symposium, September (Citeseer, 1985), p. 1000.
  19. E. N. Ivanov, M. E. Tobar, and R. A. Woode, Microwave interferometry: Application to precision measurements and noise reduction techniques, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45, 1526 (1998).
  20. E. Rubiola and V. Giordano, Advanced interferometric phase and amplitude noise measurements, Rev. Sci. Instrum. 73, 2445 (2002).
  21. S. Tamaru, K. Yakushiji, A. Fukushima, S. Yuasa, and H. Kubota, Ultrahigh sensitivity ferromagnetic resonance measurement based on microwave interferometer, IEEE Magn. Lett. 5, 1 (2014).
  22. S. Sievers, J. Kurda, N. Liebing, F. Hohls, and H. W. Schumacher, Microwave interferometry for high sensitivity VNA-FMR measurements, IEEE Trans. Magn. 53, 1 (2017).
  23. C. A. Skoryna-Kline, J. Monroy-Ruz, and K. C. Balram, Piezoelectric microresonators for sensitive spin detection, Phys. Rev. Appl. 22, 064019 (2024).
  24. D. Ballantine Jr, R. M. White, S. J. Martin, A. J. Ricco, E. Zellers, G. Frye, and H. Wohltjen, Acoustic Wave Sensors: Theory, Design and Physico-Chemical Applications (Elsevier, Amsterdam, Netherlands, 1996).
  25. A. Siddiqui, R. H. Olsson, and M. Eichenfield, Lamb wave focusing transducer for efficient coupling to wavelength-scale structures in thin piezoelectric films, J. Microelectromech. Syst. 27, 1054 (2018).
  26. H. Qiao, É. Dumur, G. Andersson, H. Yan, M.-H. Chou, J. Grebel, C. R. Conner, Y. J. Joshi, J. M. Miller, R. G. Povey, et al., Splitting phonons: Building a platform for linear mechanical quantum computing, Science 380, 1030 (2023).
  27. A. Zivari, N. Fiaschi, L. Scarpelli, M. Jansen, T. R. Burgwal, E. Verhagen, and S. Gröblacher, A single-phonon directional coupler, Opt. Quantum 3, 445 (2025).
  28. W. Fu, Z. Shen, Y. Xu, C.-L. Zou, R. Cheng, X. Han, and H. X. Tang, Phononic integrated circuitry and spin–orbit interaction of phonons, Nat. Commun. 10, 2743 (2019).
  29. F. M. Mayor, W. Jiang, C. J. Sarabalis, T. P. McKenna, J. D. Witmer, and A. H. Safavi-Naeini, Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire, Phys. Rev. Appl. 15, 014039 (2021).
  30. A. R. Will-Cole, X. Du, B. Luo, V. Lauter, A. Grutter, L. Hackett, M. Miller, Y. Deng, B. Smith, O. Pitcl, et al., Chiral microwave nonreciprocity demonstrated via Rayleigh and Sezawa modes supported in an Al 0.58 Sc 0.42 N/4H-SiC platform, Phys. Rev. Appl. 23, 034058 (2025).
  31. J. Guida and S. Ghosh, Phononic integrated circuit component design and analysis for surface acoustic waves in ScAlN on silicon carbide, J. Microelectromech. Syst. 0, 0 (2025).
  32. X.-B. Xu, J.-Q. Wang, Y.-H. Yang, W. Wang, Y.-L. Zhang, B.-Z. Wang, C.-H. Dong, L. Sun, G.-C. Guo, and C.-L. Zou, High-frequency traveling-wave phononic cavity with sub-micron wavelength, Appl. Phys. Lett. 120, 163503 (2022).
  33. L. Shao, D. Zhu, M. Colangelo, D. Lee, N. Sinclair, Y. Hu, P. T. Rakich, K. Lai, K. K. Berggren, and M. Lončar, Electrical control of surface acoustic waves, Nat. Electron. 5, 348 (2022).
  34. L. Shao, S. W. Ding, Y. Ma, Y. Zhang, N. Sinclair, and M. Lončar, Thermal modulation of gigahertz surface acoustic waves on lithium niobate, Phys. Rev. Appl. 18, 054078 (2022).
  35. J. C. Taylor, E. Chatterjee, W. F. Kindel, D. Soh, and M. Eichenfield, Reconfigurable quantum phononic circuits via piezo-acoustomechanical interactions, npj Quantum Inf. 8, 19 (2022).
  36. J. Li, X. Xu, Y. Li, and T. Wu, Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film, Appl. Phys. Lett. 126, 092201 (2025).
  37. X.-B. Xu, M. Oudich, Y. Zeng, J.-Z. Zhang, Y.-H. Yang, J.-Q. Wang, W. Wang, L. Sun, G.-C. Guo, Y. Jing, et al., Gigahertz topological phononic circuits based on micrometre-scale unsuspended waveguide arrays, Nat. Electron. 8, 689 (2025).
  38. X.-B. Xu, Y. Zeng, J.-Q. Wang, Z.-H. Tian, J.-Z. Zhang, Y.-H. Yang, Z.-X. Zhu, J.-H. Zou, L. Xiao, W. Wang, et al., Large-scale programmable phononic integrated circuits, arXiv:2510.26596.
  39. W. Wang, L. Xiao, B. Zhang, Y. Zeng, Z. Hua, C. Ma, H. Huang, Y. Xu, J.-Q. Wang, G. Xue, et al., Circuit Quantum Acoustodynamics in a Scalable Phononic Integrated Circuit Architecture, arXiv:2512.04953.
  40. A. Fahad Malik, M. Bicer, and K. C. Balram, Temporal dynamics of GHz acoustic waves in chipscale phononic integrated circuits, J. Microelectromech. Syst. 34, 653 (2025).
  41. M. Wollensack, J. Hoffmann, J. Ruefenacht, and M. Zeier, in 79th ARFTG Microwave Measurement Conference (IEEE, 2012), p. 1.
  42. K.-y. Hashimoto, T. Omori, and M. Yamaguchi, Design considerations on surface acoustic wave resonators with significant internal reflection in interdigital transducers, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51, 1394 (2004).
  43. H. Iwamoto, T. Takai, Y. Takamine, T. Nakao, T. Fuyutsume, and M. Koshino, in 2018 IEEE International Ultrasonics Symposium (IUS) (IEEE, 2018), p. 1.
  44. M. Rais-Zadeh, V. J. Gokhale, A. Ansari, M. Faucher, D. Théron, Y. Cordier, and L. Buchaillot, Gallium nitride as an electromechanical material, J. Microelectromech. Syst. 23, 1252 (2014).

Outline

Information

Sign In to Your Journals Account

Filter

Filter

Article Lookup

Enter a citation