Superinductances are superconducting circuit elements that combine a large inductance with a low parasitic capacitance to ground, resulting in a characteristic impedance exceeding the resistance quantum $R_Q=h/(2e{)}^2\simeq 6.45\mathrm{k}\mathrm{\Omega }$. In recent years, these components have become key enablers for emerging quantum circuit architectures. However, achieving high characteristic impedance while maintaining scalability and fabrication robustness remains a major challenge. In this work, we present two fabrication techniques for realizing superinductances based on vertically stacked Josephson junctions. Using a multiangle Manhattan (MAM) process and a zero-angle (ZA) evaporation technique—in which junction stacks are connected pairwise using airbridges—we fabricate one-dimensional chains of stacks that act as high-impedance superconducting transmission lines. Two-tone microwave spectroscopy reveals the expected $\sqrt{n}$ scaling of the impedance with the number of junctions per stack. The chain fabricated using the ZA process, with nine junctions per stack, achieves a characteristic impedance of approximately $16\mathrm{k}\mathrm{\Omega }$, a total inductance of $5.9\text{μ}\mathrm{H}$, and a maximum frequency-dependent impedance of $50\mathrm{k}\mathrm{\Omega }$ at 1.4 GHz. Our results establish junction stacking as a scalable, robust, and flexible platform for next-generation quantum circuits requiring ultrahigh impedance environments.

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• Quantum circuits
• Quantum harmonic oscillator
• Josephson junctions
• Superconducting devices
• Dilution refrigerator
• Microwave techniques