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    Unlocking the Q-factor limit of topologically protected photonic bound states in the continuum in all-dielectric terahertz metasurfaces

    Yue Wang*, Guangcheng Sun, Wenshuo Chen, Xiang Zhang, and Yaohe Li

    Kebin Fan

    Zijian Cui, Zheng You†, and Xiaoguang Zhao‡

    • Research Institute of Superconductor Electronics, School of Electronic Science and Engineering, Nanjing University, Nanjing, 210093 Jiangsu, China

    • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, 100084 Beijing, China

    • *Contact author: wangyue2017@xaut.edu.cn
    • †Contact author: yz-dpi@mail.tsinghua.edu.cn
    • ‡Contact author: zhaoxg@mail.tsinghua.edu.cn

    Phys. Rev. Applied 24, 014039 – Published 21 July, 2025

    DOI: https://doi.org/10.1103/3r2g-8xxt

    Abstract

    Photonic bound states in the continuum (BICs), possessing two unique properties of infinitely high quality (Q) factor and momentum-space polarization vortex, promise unprecedented opportunities for tailoring high-Q resonances and enhancing light field manipulation. Recently, all-dielectric metasurfaces (MSs) underpinned by high refractive index and low intrinsic loss materials have unlocked the full potentials of BICs to realize ultrahigh-Q resonances. However, experimental demonstrations of high-Q terahertz BICs resonances in all-dielectric MSs with substrates remain a long-standing challenge. Here we propose and fabricate a paradigm of a crystalline silicon terahertz MS over a quartz substrate to demonstrate optical resonators with high-Q quasi-BICs resonances. These resonators feature the simultaneous excitation of multiple topologically protected symmetry-protected BICs and accidental BICs. Under larger asymmetries, two additional BICs are observed in symmetry-broken terahertz MSs, thereby offering an extra degree of freedom for engineering BICs and easing fabrication. Our experimental results reveal two quasi-BICs modes characterized by sharp Fano resonances that boast an unparalleled Q factor of up to 265, which is the highest reported experimental Q factor in a terahertz MS with a substrate. We envision that these findings will not only hold enormous prospects for broadening the functional scope of terahertz metaphotonics but will also lay the groundwork for the realization of high-performance terahertz optoelectronic devices and metadevices.

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