Formation of metastable and anions in sputtering
Hubert Gnaser
Phys. Rev. A 56, R2518(R) (1997) - Published 1 October, 1997
Sputtering the surface of a TiAlN(C,O) specimen with a ion beam produces negative molecular ions of and They are detected in a double-focusing mass spectrometer operated at a mass resolution of this provides a separation of interfering species in this mass region (e.g., ) and a mass assignment at a precision of The flux of relative to the stable amounts to about 0.3. On average, one is formed for N atoms sputtered and a similar rate is observed for The flight time through the mass spectrometer () sets a lower limit for the stability of these molecular anions. The abundant production of electronically excited molecules in sputtering is proposed to constitute the prerequisite for the formation of and these excited molecules may capture a surface electron forming thus a temporary negative-ion state (Feshbach resonance). By contrast, the upper limit for the emission of is found to be less than one per nitrogen atoms ejected, in agreement with the very short lifetimes of the excited anions.