Yuki Inada*,†, Tatsutoshi Shioda, and Ryosuke Nakamura
Akiko Kumada
Mitsuaki Maeyama
Ryo Ono
Seungwon Mok, Yiming Pan, Kentaro Tomita, and Ryo Ono
Plasma Sources Sci. Technol. 35 035009 (2026)