Measuring Chemical Shifts with Energy-Dispersive X-Ray Spectroscopy
Phys. Rev. Lett. 135, 157002 – Published 8 October, 2025
DOI: https://doi.org/10.1103/t1rs-7kr2
Abstract
Electron microscopy uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30 and 100 eV or 0.01 and 1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02–0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
