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Atomic Resolution in Near-Edge Core-Loss Mapping Beyond the Conventional Delocalization Limit

Jiayi Wu1, Juri Barthel2, Leslie J. Allen3, and Mitsutaka Haruta1

Phys. Rev. Lett. 137, 056402 – Published 28 July, 2026

DOI: https://doi.org/10.1103/9y69-62kf

Abstract

The spatial resolution of core-loss electron energy-loss spectroscopy (EELS) is limited by the delocalization of inelastic scattering from long-range Coulomb interactions, especially for light-element edges at low energy losses. Here we demonstrate atomic-resolution imaging of the Si L edge in Si [110] using dark-field annular EELS that selectively detects high-angle inelastic scattering. Although the intrinsic excitation delocalization remains unchanged, momentum-transfer–selective detection suppresses long-range contributions, enabling the 1.36 Å Si dumbbell to be resolved.

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