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Hydrogen migration and electronic carriers in a-Si:H

Paulo V. Santos, N. M. Johnson, R. A. Street, M. Hack, R. Thompson, and C. C. Tsai
Phys. Rev. B 47, 10244 – Published 15 April 1993
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Abstract

The relationship between electronic carriers and hydrogen migration in a-Si:H was investigated by using secondary-ion-mass spectrometry to measure deuterium-diffusion profiles in the intrinsic (i) layer of p-i-n a-Si:H photodiodes. The carrier concentration in the i layer was controlled by varying either the temperature, or the illumination intensity, or the bias applied to the devices. It is demonstrated that hydrogen migration in a-Si:H is controlled by an electronic mechanism, and (i) is enhanced when the carrier population is increased by illumination and (ii) is suppressed when it is reduced below the thermal-equilibrium value by the application of a reverse bias to the diodes. The effect is attributed to the dependence on carrier density of the dissociation rate of hydrogen from Si-H bonds into the diffusion path consisting of interstitial sites. In addition, the migration length in the diffusion path increases under reverse bias. The enhanced migration is associated with a decrease in the effective density of traps for hydrogen in a carrier-depleted layer. The trap density under these conditions is close to the dangling-bond density, suggesting that the migration length is determined by capture into these defects. Possible mechanisms for the interaction between hydrogen migration, carriers, and defects are discussed.

  • Received 14 December 1992

DOI:https://doi.org/10.1103/PhysRevB.47.10244

©1993 American Physical Society

Authors & Affiliations

Paulo V. Santos, N. M. Johnson, R. A. Street, M. Hack, R. Thompson, and C. C. Tsai

  • Xerox Corporation, Palo Alto Research Center, 3333 Coyote Hill Rd., Palo Alto, California 94304

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Vol. 47, Iss. 16 — 15 April 1993

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