- Open Access
High-Speed Wide-Field Imaging of Microcircuitry Using Nitrogen Vacancies in Diamond
Phys. Rev. Applied 17, 064051 – Published 27 June, 2022
DOI: https://doi.org/10.1103/PhysRevApplied.17.064051
Abstract
The ability to measure the passage of electrical current with high spatial and temporal resolution is vital for applications ranging from inspection of microscopic electronic circuits to biosensing. The ability to image such signals passively and remotely is of great importance, in order to measure without invasive disruption of the system under study or the signal itself. A recent approach to achieving this utilizes point defects in solid-state materials; in particular, nitrogen-vacancy centers in diamond. Acting as a high-density array of independent sensors, addressable opto-electronically and highly sensitive to factors including temperature and magnetic field, these are ideally suited to microscopic wide-field imaging. In this work, we demonstrate simultaneous spatially and temporally resolved recovery signals from a microscopic lithographically patterned circuit. Through application of a lock-in amplifier camera, we demonstrate micrometer-scale imaging resolution with a millimeter-scale field of view with simultaneous spatially resolved submillisecond (up to 3500 frames ) recovery of dc to kilohertz alternating and broadband pulsed-current electrical signals, without aliasing or undersampling. We demonstrate as examples of our method the recovery of synthetic signals replicating digital pulses in integrated circuits and signals that would be observed in a biological neuronal network in the brain.
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References (69)
- R. Hoffmann-Vogel, Electromigration and the structure of metallic nanocontacts, Appl. Phys. Rev. 4, 031302 (2017).
- U. Kindereit, in 2014 IEEE International Reliability Physics Symposium (IEEE, 2014).
- K. Nakamae, Electron microscopy in semiconductor inspection, Meas. Sci. Technol. 32, 052003 (2021).
- J. True, C. Xi, N. Jessurun, K. Ahi, and N. Asadizanjani, Review of THz-based semiconductor assurance, Opt. Eng. 60, 060901 (2021).
- A. V. Ulyanova, C. Cottone, C. D. Adam, K. G. Gagnon, D. K. Cullen, T. Holtzman, B. G. Jamieson, P. F. Koch, H. I. Chen, V. E. Johnson, and J. A. Wolf, Multichannel silicon probes for awake hippocampal recordings in large animals, Front. Neurosci. 13, (2019).
- K. Ohki, S. Chung, Y. H. Ch’ng, P. Kara, and R. C. Reid, Functional imaging with cellular resolution reveals precise micro-architecture in visual cortex, Nature 433, 597 (2005).
- F. Dolde, H. Fedder, M. W. Doherty, T. Nöbauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, Electric-field sensing using single diamond spins, Nat. Phys. 7, 459 (2011).
- P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, High-precision nanoscale temperature sensing using single defects in diamond, Nano Lett. 13, 2738 (2013).
- S. Knauer, J. P. Hadden, and J. G. Rarity, In-situ measurements of fabrication induced strain in diamond photonic-structures using intrinsic colour centres, npj Quantum Inf. 6, 50 (2020).
- D. Cohen, R. Nigmatullin, O. Kenneth, F. Jelezko, M. Khodas, and A. Retzker, Utilising NV based quantum sensing for velocimetry at the nanoscale, Sci. Rep. 10, 5298 (2020).
- Y. Liu, H. Guo, W. Zhang, Z. Zhang, Z. Li, Y. Li, J. Tang, Z. Ma, and J. Liu, Nanoscale detection of faint machinery vibration using the NV center in diamond, Phys. Lett. A 384, 126832 (2020).
- J. M. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. R. Hemmer, A. Yacoby, R. Walsworth, and M. D. Lukin, High-sensitivity diamond magnetometer with nanoscale resolution, Nat. Phys. 4, 810 (2008).
- S. Hong, M. S. Grinolds, L. M. Pham, D. L. Sage, L. Luan, R. L. Walsworth, and A. Yacoby, Nanoscale magnetometry with NV centers in diamond, MRS Bull. 38, 155 (2013).
- T. Wolf, P. Neumann, K. Nakamura, H. Sumiya, T. Ohshima, J. Isoya, and J. Wrachtrup, Subpicotesla diamond magnetometry, Phys. Rev. X 5, 041001 (2015).
- A. Gruber, Scanning confocal optical microscopy and magnetic resonance on single defect centers, Science 276, 2012 (1997).
- P. Delaney, J. C. Greer, and J. A. Larsson, Spin-polarization mechanisms of the nitrogen-vacancy center in diamond, Nano Lett. 10, 610 (2010).
- E. V. Levine, M. J. Turner, P. Kehayias, C. A. Hart, N. Langellier, R. Trubko, D. R. Glenn, R. R. Fu, and R. L. Walsworth, Principles and techniques of the quantum diamond microscope, Nanophotonics 8, 1945 (2019).
- A. Horsley, P. Appel, J. Wolters, J. Achard, A. Tallaire, P. Maletinsky, and P. Treutlein, Microwave Device Characterization Using a Widefield Diamond Microscope, Phys. Rev. Appl. 10, 044039 (2018).
- Y. Chen, Z. Li, H. Guo, D. Wu, and J. Tang, Simultaneous imaging of magnetic field and temperature using a wide-field quantum diamond microscope, EPJ Quantum Technol. 8, 8 (2021).
- J.-P. Tetienne, N. Dontschuk, D. A. Broadway, A. Stacey, D. A. Simpson, and L. C. L. Hollenberg, Quantum imaging of current flow in graphene, Sci. Adv. 3, e1602429 (2017).
- M. J. H. Ku, T. X. Zhou, Q. Li, Y. J. Shin, J. K. Shi, C. Burch, L. E. Anderson, A. T. Pierce, Y. Xie, A. Hamo, U. Vool, H. Zhang, F. Casola, T. Taniguchi, K. Watanabe, M. M. Fogler, P. Kim, A. Yacoby, and R. L. Walsworth, Imaging viscous flow of the Dirac fluid in graphene, Nature 583, 537 (2020).
- D. R. Glenn, R. R. Fu, P. Kehayias, D. L. Sage, E. A. Lima, B. P. Weiss, and R. L. Walsworth, Micrometer-scale magnetic imaging of geological samples using a quantum diamond microscope, Geochem. Geophys. Geosyst. 18, 3254 (2017).
- J. C. Price, R. Mesquita-Ribeiro, F. Dajas-Bailador, and M. L. Mather, Widefield, spatiotemporal mapping of spontaneous activity of mouse cultured neuronal networks using quantum diamond sensors, Front. Phys. 8, (2020).
- D. L. Sage, K. Arai, D. R. Glenn, S. J. DeVience, L. M. Pham, L. Rahn-Lee, M. D. Lukin, A. Yacoby, A. Komeili, and R. L. Walsworth, Optical magnetic imaging of living cells, Nature 496, 486 (2013).
- R. Schirhagl, K. Chang, M. Loretz, and C. L. Degen, Nitrogen-vacancy centers in diamond: Nanoscale sensors for physics and biology, Annu. Rev. Phys. Chem. 65, 83 (2014).
- L. T. Hall, G. C. G. Beart, E. A. Thomas, D. A. Simpson, L. P. McGuinness, J. H. Cole, J. H. Manton, R. E. Scholten, F. Jelezko, J. Wrachtrup, S. Petrou, and L. C. L. Hollenberg, High spatial and temporal resolution wide-field imaging of neuron activity using quantum NV-diamond, Sci. Rep. 2, 401 (2012).
- L. M. Pham, D. L. Sage, P. L. Stanwix, T. K. Yeung, D. Glenn, A. Trifonov, P. Cappellaro, P. R. Hemmer, M. D. Lukin, H. Park, A. Yacoby, and R. L. Walsworth, Magnetic field imaging with nitrogen-vacancy ensembles, New J. Phys. 13, 045021 (2011).
- A. M. Wojciechowski, M. Karadas, A. Huck, C. Osterkamp, S. Jankuhn, J. Meijer, F. Jelezko, and U. L. Andersen, Contributed review: Camera-limits for wide-field magnetic resonance imaging with a nitrogen-vacancy spin sensor, Rev. Sci. Instrum. 89, 031501 (2018).
- J. L. Webb, L. Troise, N. W. Hansen, J. Achard, O. Brinza, R. Staacke, M. Kieschnick, J. Meijer, J.-F. Perrier, K. Berg-Sørensen, A. Huck, and U. L. Andersen, Optimization of a diamond nitrogen vacancy centre magnetometer for sensing of biological signals, Front. Phys. 8, (2020).
- R. Tanos, W. Akhtar, S. Monneret, F. F. de Oliveira, G. Seniutinas, M. Munsch, P. Maletinsky, L. le Gratiet, I. Sagnes, A. Dréau, C. Gergely, V. Jacques, G. Baffou, and I. Robert-Philip, Optimal architecture for diamond-based wide-field thermal imaging, AIP Adv. 10, 025027 (2020).
- D. A. Simpson, J.-P. Tetienne, J. M. McCoey, K. Ganesan, L. T. Hall, S. Petrou, R. E. Scholten, and L. C. L. Hollenberg, Magneto-optical imaging of thin magnetic films using spins in diamond, Sci. Rep. 6, 22797 (2016).
- D. A. Broadway, S. C. Scholten, C. Tan, N. Dontschuk, S. E. Lillie, B. C. Johnson, G. Zheng, Z. Wang, A. R. Oganov, S. Tian, C. Li, H. Lei, L. Wang, L. C. L. Hollenberg, and J.-P. Tetienne, Imaging domain reversal in an ultrathin van der Waals ferromagnet, Adv. Mater. 32, 2003314 (2020).
- Z. Kazi, I. M. Shelby, H. Watanabe, K. M. Itoh, V. Shutthanandan, P. A. Wiggins, and K.-M. C. Fu, Wide-Field Dynamic Magnetic Microscopy Using Double-Double Quantum Driving of a Diamond Defect Ensemble, Phys. Rev. Appl. 15, 054032 (2021).
- K. Mizuno, H. Ishiwata, Y. Masuyama, T. Iwasaki, and M. Hatano, Simultaneous wide-field imaging of phase and magnitude of AC magnetic signal using diamond quantum magnetometry, Sci. Rep. 10, 11611 (2020).
- P. Lambelet, in Optical Measurement Systems for Industrial Inspection VII, edited by P. H. Lehmann, W. Osten, and K. Gastinger (SPIE, 2011).
- R. Patel, S. Achamfuo-Yeboah, R. Light, and M. Clark, Widefield heterodyne interferometry using a custom CMOS modulated light camera, Opt. Express 19, 24546 (2011).
- J. F. Barry, J. M. Schloss, E. Bauch, M. J. Turner, C. A. Hart, L. M. Pham, and R. L. Walsworth, Sensitivity optimization for NV-diamond magnetometry, Rev. Mod. Phys. 92, 015004 (2020).
- See the Supplemental Material at http://link.aps.org/supplemental/10.1103/PhysRevApplied.17.064051 for supplementary data and plots referred to in the text.
- L. M. Pham, N. Bar-Gill, D. L. Sage, C. Belthangady, A. Stacey, M. Markham, D. J. Twitchen, M. D. Lukin, and R. L. Walsworth, Enhanced metrology using preferential orientation of nitrogen-vacancy centers in diamond, Phys. Rev. B 86, (2012).
- N. D. Lai, D. Zheng, F. Jelezko, F. Treussart, and J.-F. Roch, Influence of a static magnetic field on the photoluminescence of an ensemble of nitrogen-vacancy color centers in a diamond single-crystal, Appl. Phys. Lett. 95, 133101 (2009).
- A. Cooper, E. Magesan, H. N. Yum, and P. Cappellaro, Time-resolved magnetic sensing with electronic spins in diamond, Nat. Commun. 5, 3141 (2014).
- J. L. Webb, L. Troise, N. W. Hansen, C. Olsson, A. M. Wojciechowski, J. Achard, O. Brinza, R. Staacke, M. Kieschnick, J. Meijer, A. Thielscher, J.-F. Perrier, K. Berg-Sørensen, A. Huck, and U. L. Andersen, Detection of biological signals from a live mammalian muscle using an early stage diamond quantum sensor, Sci. Rep. 11, 2412 (2021).
- J. M. Schloss, J. F. Barry, M. J. Turner, and R. L. Walsworth, Simultaneous Broadband Vector Magnetometry Using Solid-State Spins, Phys. Rev. Appl. 10, (2018).
- C. Henneberger, T. Papouin, S. H. R. Oliet, and D. A. Rusakov, Long-term potentiation depends on release of d-serine from astrocytes, Nature 463, 232 (2010).
- R. L. Redondo, H. Okuno, P. A. Spooner, B. G. Frenguelli, H. Bito, and R. G. M. Morris, Synaptic tagging and capture: Differential role of distinct calcium/calmodulin kinases in protein synthesis-dependent long-term potentiation, J. Neurosci. 30, 4981 (2010).
- I. Sánchez-Rodríguez, S. Temprano-Carazo, A. Nájera, S. Djebari, J. Yajeya, A. Gruart, J. M. Delgado-García, L. Jiménez-Díaz, and J. D. Navarro-López, Activation of G-protein-gated inwardly rectifying potassium (Kir3/GirK) channels rescues hippocampal functions in a mouse model of early amyloid- pathology, Sci. Rep. 7, (2017).
- J. Mitterdorfer and B. P. Bean, Potassium currents during the action potential of hippocampal CA3 neurons, J. Neurosci. 22, 10106 (2002).
- W. D. Arnold, K. A. Sheth, C. G. Wier, J. T. Kissel, A. H. Burghes, and S. J. Kolb, Electrophysiological motor unit number estimation (MUNE) measuring compound muscle action potential (CMAP) in mouse hindlimb muscles, J. Vis. Exp. (2015),.
- K. Arai, A. Kuwahata, D. Nishitani, I. Fujisaki, R. Matsuki, Z. Xin, Y. Nishio, X. Cao, Y. Hatano, S. Onoda, C. Shinei, M. Miyakawa, T. Taniguchi, M. Yamazaki, T. Teraji, T. Ohshima, M. Hatano, M. Sekino, and T. Iwasaki, Millimetre-scale magnetocardiography of living rats using a solid-state quantum sensor (2021), ArXiv:2105.11676.
- I. Fescenko, A. Jarmola, I. Savukov, P. Kehayias, J. Smits, J. Damron, N. Ristoff, N. Mosavian, and V. M. Acosta, Diamond magnetometer enhanced by ferrite flux concentrators, Phys. Rev. Res. 2, 023394 (2020).
- A. M. Romshin, V. Zeeb, A. K. Martyanov, O. S. Kudryavtsev, D. G. Pasternak, V. S. Sedov, V. G. Ralchenko, A. G. Sinogeykin, and I. I. Vlasov, A new approach to precise mapping of local temperature fields in submicrometer aqueous volumes, Sci. Rep. 11, 14228 (2021).
- M. Karadas, A. M. Wojciechowski, A. Huck, N. O. Dalby, U. L. Andersen, and A. Thielscher, Feasibility and resolution limits of opto-magnetic imaging of neural network activity in brain slices using color centers in diamond, Sci. Rep. 8, 4503 (2018).
- M. Karadas, C. Olsson, N. W. Hansen, J.-F. Perrier, J. L. Webb, A. Huck, U. L. Andersen, and A. Thielscher, In-vitro recordings of neural magnetic activity from the auditory brainstem using color centers in diamond: A simulation study, Front. Neurosci. 15, (2021).
- J. F. Barry, M. J. Turner, J. M. Schloss, D. R. Glenn, Y. Song, M. D. Lukin, H. Park, and R. L. Walsworth, Optical magnetic detection of single-neuron action potentials using quantum defects in diamond, Proc. Nat. Acad. Sci. 113, 14133 (2016).
- H. Clevenson, M. E. Trusheim, C. Teale, T. Schröder, D. Braje, and D. Englund, Broadband magnetometry and temperature sensing with a light-trapping diamond waveguide, Nat. Phys. 11, 393 (2015).
- H. Yu, Y. Xie, Y. Zhu, X. Rong, and J. Du, Enhanced sensitivity of the nitrogen-vacancy ensemble magnetometer via surface coating, Appl. Phys. Lett. 117, 204002 (2020).
- E. E. Kleinsasser, M. M. Stanfield, J. K. Q. Banks, Z. Zhu, W.-D. Li, V. M. Acosta, H. Watanabe, K. M. Itoh, and K.-M. C. Fu, High density nitrogen-vacancy sensing surface created via ion implantation of diamond, Appl. Phys. Lett. 108, 202401 (2016).
- C. Osterkamp, M. Mangold, J. Lang, P. Balasubramanian, T. Teraji, B. Naydenov, and F. Jelezko, Engineering preferentially-aligned nitrogen-vacancy centre ensembles in CVD grown diamond, Sci. Rep. 9, (2019).
- P. Balasubramanian, C. Osterkamp, Y. Chen, X. Chen, T. Teraji, E. Wu, B. Naydenov, and F. Jelezko, dc magnetometry with engineered nitrogen-vacancy spin ensembles in diamond, Nano Lett. 19, 6681 (2019).
- J. Schloss, Ph.D. thesis, Department of Physics, Massachusetts Institute of Technology, 2019.
- Heliotis, Private communication (2021).
- B. Wang, W. Ke, J. Guang, G. Chen, L. Yin, S. Deng, Q. He, Y. Liu, T. He, R. Zheng, Y. Jiang, X. Zhang, T. Li, G. Luan, H. D. Lu, M. Zhang, X. Zhang, and Y. Shu, Firing frequency maxima of fast-spiking neurons in human, monkey, and mouse neocortex, Front. Cell. Neurosci. 10, (2016).
- A. Dréau, M. Lesik, L. Rondin, P. Spinicelli, O. Arcizet, J.-F. Roch, and V. Jacques, Avoiding power broadening in optically detected magnetic resonance of single NV defects for enhanced dc magnetic field sensitivity, Phys. Rev. B 84, 195204 (2011).
- S. T. Alsid, J. F. Barry, L. M. Pham, J. M. Schloss, M. F. O’Keeffe, P. Cappellaro, and D. A. Braje, Photoluminescence Decomposition Analysis: A Technique to Characterize - Creation In Diamond, Phys. Rev. Appl. 12, 044003 (2019).
- S. Castelletto and A. Boretti, Silicon carbide color centers for quantum applications, J. Phys.: Photon. 2, 022001 (2020).
- C. A. Hart, J. M. Schloss, M. J. Turner, P. J. Scheidegger, E. Bauch, and R. L. Walsworth, -–Diamond Magnetic Microscopy Using a Double Quantum 4-Ramsey Protocol, Phys. Rev. Appl. 15, 044020 (2021).
- M. Fujiwara, S. Sun, A. Dohms, Y. Nishimura, K. Suto, Y. Takezawa, K. Oshimi, L. Zhao, N. Sadzak, Y. Umehara, Y. Teki, N. Komatsu, O. Benson, Y. Shikano, and E. Kage-Nakadai, Real-time nanodiamond thermometry probing in vivo thermogenic responses, Sci. Adv. 6, eaba9636 (2020).
- M. Parashar, D. Shishir, A. Bathla, A. Gokhale, S. Bandyopadhyay, and K. Saha, Lock-in detection based dynamic widefield magnetometry using quantum defects in diamond (2021), ArXiv:2107.12232.
- M. Turner, Ph.D. thesis, Department of Physics, Harvard University, 2020.