High-performance robust ScNx/Nb/ScNx heaters for an integrated silicon nitride low-loss photonic platformRemoveNikita Yu. Dmitriev, Alexandr M. Mumlyakov, Maksim V. Shibalov, Ivan A. Filippov, Galina V. Molodtsova, Igor V. Trofimov, Darja A. Brukvina, Igor A. Bilenko, and Michael A. TarkhovPhys. Rev. Applied 24, 054077 (2025)
