Cross-plane thermal conductivity of (Ti,W)N/(Al,Sc)N metal/semiconductor superlatticesRemoveBivas Saha, Yee Rui Koh, Jonathan Comparan, Sridhar Sadasivam, Jeremy L. Schroeder, Magnus Garbrecht, Amr Mohammed, Jens Birch, Timothy Fisher, Ali Shakouri, and Timothy D. SandsPhys. Rev. B 93, 045311 (2016)