The thickness uniformity and the spatial distribution of lattice relaxation in thin ( 8 nm) Ca/Si(111) films, observed with photoelectron spectroscopy and transmission electron microscopy, are seen to depend strongly on the initial nucleation kinetics. We develop a general model for heteroepitaxial growth that explains both these and literature results. Terrace or step nucleation leads to laminar films, although with different relaxation patterns; combined step and terrace nucleation leads to rough films due to different upper-layer nucleation rates on the differently sized islands.
- Received 20 March 1995
- Published in the issue dated 18 September 1995
© 1995 The American Physical Society