Role of Step and Terrace Nucleation in Heteroepitaxial Growth Morphology: Growth Kinetics of CaF2/Si(111)

Phys. Rev. Lett. 75, 2380 – Published 18 September 1995
Uwe Hessinger, M. Leskovar, and Marjorie A. Olmstead

Abstract

The thickness uniformity and the spatial distribution of lattice relaxation in thin ( <8 nm) CaF2/Si(111) films, observed with photoelectron spectroscopy and transmission electron microscopy, are seen to depend strongly on the initial nucleation kinetics. We develop a general model for heteroepitaxial growth that explains both these and literature results. Terrace or step nucleation leads to laminar films, although with different relaxation patterns; combined step and terrace nucleation leads to rough films due to different upper-layer nucleation rates on the differently sized islands.

DOI: http://dx.doi.org/10.1103/PhysRevLett.75.2380

  • Received 20 March 1995
  • Published in the issue dated 18 September 1995

© 1995 The American Physical Society

Authors & Affiliations

Uwe Hessinger, M. Leskovar, and Marjorie A. Olmstead

  • Department of Physics, University of Washington, Box 35-1560, Seattle, Washington 98195-1560

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